Development of photo-diodes for Pohang-Accelerator-Laboratory X-ray free-electron laser

S. C. Lee; J. M. Baek; S. M. Hwang; H. J. Hyun; J. Y. Kim; S. H. Kim; H. Park

doi:10.1016/j.nima.2022.167598

Development of photo-diodes for Pohang-Accelerator-Laboratory X-ray free-electron laser

S. C. Lee, J. M. Baek, S. M. Hwang, H. J. Hyun, J. Y. Kim, S. H. Kim, H. Park

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The Pohang-Accelerator-Laboratory X-ray free-electron laser (PAL-XFEL) provides intense ultra-short X-ray pulses via a self-amplified spontaneous emission (SASE) process. Since fluctuations are induced by the intrinsic characteristics of the SASE process, we designed and fabricated photo-diodes (PDs) to be used in quadrant beam position and pop-in monitoring systems for measuring intensity and position, and beam size, respectively. Six 500μm-thick high-resistivity silicon wafers were used for different fabrication processes to vary the thicknesses of bias electrode and anti-reflective coating layers optimized for the quantum efficiency (QE) at typical wavelengths of 266 and 400 nm used for pump–probe experiments at the PAL-XFEL. In this paper, we present the electrical characteristics, QE, signal-to-noise ratio, energy resolution of the fabricated PDs, and compared them with those of commercial PD.

Original language	English
Article number	167598
Journal	Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume	1045
DOIs	https://doi.org/10.1016/j.nima.2022.167598
State	Published - 1 Jan 2023

Keywords

Energy resolution
PIN photo-diode
Pohang-Accelerator-Laboratory X-ray free-electron laser
Quantum efficiency
Signal-to-noise ratio

Access to Document

10.1016/j.nima.2022.167598

Cite this

Lee, S. C., Baek, J. M., Hwang, S. M., Hyun, H. J., Kim, J. Y., Kim, S. H., & Park, H. (2023). Development of photo-diodes for Pohang-Accelerator-Laboratory X-ray free-electron laser. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1045, Article 167598. https://doi.org/10.1016/j.nima.2022.167598

@article{4a3a36c20e00421db5c47d27120b2c3e,

title = "Development of photo-diodes for Pohang-Accelerator-Laboratory X-ray free-electron laser",

abstract = "The Pohang-Accelerator-Laboratory X-ray free-electron laser (PAL-XFEL) provides intense ultra-short X-ray pulses via a self-amplified spontaneous emission (SASE) process. Since fluctuations are induced by the intrinsic characteristics of the SASE process, we designed and fabricated photo-diodes (PDs) to be used in quadrant beam position and pop-in monitoring systems for measuring intensity and position, and beam size, respectively. Six 500μm-thick high-resistivity silicon wafers were used for different fabrication processes to vary the thicknesses of bias electrode and anti-reflective coating layers optimized for the quantum efficiency (QE) at typical wavelengths of 266 and 400 nm used for pump–probe experiments at the PAL-XFEL. In this paper, we present the electrical characteristics, QE, signal-to-noise ratio, energy resolution of the fabricated PDs, and compared them with those of commercial PD.",

keywords = "Energy resolution, PIN photo-diode, Pohang-Accelerator-Laboratory X-ray free-electron laser, Quantum efficiency, Signal-to-noise ratio",

author = "Lee, {S. C.} and Baek, {J. M.} and Hwang, {S. M.} and Hyun, {H. J.} and Kim, {J. Y.} and Kim, {S. H.} and H. Park",

note = "Publisher Copyright: {\textcopyright} 2022 Elsevier B.V.",

year = "2023",

month = jan,

day = "1",

doi = "10.1016/j.nima.2022.167598",

language = "English",

volume = "1045",

journal = "Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment",

issn = "0168-9002",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Development of photo-diodes for Pohang-Accelerator-Laboratory X-ray free-electron laser

AU - Lee, S. C.

AU - Baek, J. M.

AU - Hwang, S. M.

AU - Hyun, H. J.

AU - Kim, J. Y.

AU - Kim, S. H.

AU - Park, H.

PY - 2023/1/1

Y1 - 2023/1/1

N2 - The Pohang-Accelerator-Laboratory X-ray free-electron laser (PAL-XFEL) provides intense ultra-short X-ray pulses via a self-amplified spontaneous emission (SASE) process. Since fluctuations are induced by the intrinsic characteristics of the SASE process, we designed and fabricated photo-diodes (PDs) to be used in quadrant beam position and pop-in monitoring systems for measuring intensity and position, and beam size, respectively. Six 500μm-thick high-resistivity silicon wafers were used for different fabrication processes to vary the thicknesses of bias electrode and anti-reflective coating layers optimized for the quantum efficiency (QE) at typical wavelengths of 266 and 400 nm used for pump–probe experiments at the PAL-XFEL. In this paper, we present the electrical characteristics, QE, signal-to-noise ratio, energy resolution of the fabricated PDs, and compared them with those of commercial PD.

AB - The Pohang-Accelerator-Laboratory X-ray free-electron laser (PAL-XFEL) provides intense ultra-short X-ray pulses via a self-amplified spontaneous emission (SASE) process. Since fluctuations are induced by the intrinsic characteristics of the SASE process, we designed and fabricated photo-diodes (PDs) to be used in quadrant beam position and pop-in monitoring systems for measuring intensity and position, and beam size, respectively. Six 500μm-thick high-resistivity silicon wafers were used for different fabrication processes to vary the thicknesses of bias electrode and anti-reflective coating layers optimized for the quantum efficiency (QE) at typical wavelengths of 266 and 400 nm used for pump–probe experiments at the PAL-XFEL. In this paper, we present the electrical characteristics, QE, signal-to-noise ratio, energy resolution of the fabricated PDs, and compared them with those of commercial PD.

KW - Energy resolution

KW - PIN photo-diode

KW - Pohang-Accelerator-Laboratory X-ray free-electron laser

KW - Quantum efficiency

KW - Signal-to-noise ratio

UR - http://www.scopus.com/inward/record.url?scp=85140807347&partnerID=8YFLogxK

U2 - 10.1016/j.nima.2022.167598

DO - 10.1016/j.nima.2022.167598

M3 - Article

AN - SCOPUS:85140807347

SN - 0168-9002

VL - 1045

JO - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

JF - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

M1 - 167598

ER -

Development of photo-diodes for Pohang-Accelerator-Laboratory X-ray free-electron laser

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this