Digitally patterned resistive micro heater as a platform for zinc oxide nanowire based micro sensor

Jinhyeong Kwon, Sukjoon Hong, Gunho Kim, Young D. Suh, Habeom Lee, Seung Yeon Choo, Daeho Lee, Heejung Kong, Junyeob Yeo, Seung Hwan Ko

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

Abstract

Among the various techniques for micro patterning of metal oxide nanowire, the resistive micro heater is promising technique due to the merit of localized and selective growth of sensing nanowire. In this study, we introduce a facile maskless fabrication of resistive micro heater using selective laser sintering of silver nanoparticle without using any conventional photolithography or vacuum deposition. By localized hydrothermal synthesis of ZnO nanowire using Joule heating of the resistive micro heater, the digitally patterned resistive micro heater is applied to the ZnO nanowire based micro UV sensor.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalApplied Surface Science
Volume447
DOIs
StatePublished - 31 Jul 2018

Keywords

  • Hydrothermal growth
  • Nanowire
  • Resistive micro heater
  • Selective laser sintering
  • ZnO

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