Dry etching of zinc-oxide and indium-zinc-oxide in IBr and BI 3 plasma chemistries
- W. T. Lim
- , L. Stafford
- , Ju Il Song
- , Jae Soung Park
- , Y. W. Heo
- , Joon Hyung Lee
- , Jeong Joo Kim
- , S. J. Pearton
- University of Florida
- Kyungpook National University
Research output: Contribution to journal › Article › peer-review
18
Scopus
citations