Fingerprint
Dive into the research topics of 'Dry etching of zinc-oxide and indium-zinc-oxide in IBr and BI 3 plasma chemistries'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Dry etching of zinc-oxide and indium-zinc-oxide in IBr and BI 3 plasma chemistries
W. T. Lim, L. Stafford, Ju Il Song, Jae Soung Park, Y. W. Heo, Joon Hyung Lee, Jeong Joo Kim, S. J. Pearton
Research output: Contribution to journal › Article › peer-review
17
Scopus
citations