Effect of growth temperature on the structural and electrical properties of ZrO2 films fabricated by atomic layer deposition using a CpZr[N(CH3)2]3/C7H8 cocktail precursor

  • Jong Ki An
  • , Nak Kwan Chung
  • , Jin Tae Kim
  • , Sung Ho Hahm
  • , Geunsu Lee
  • , Sung Bo Lee
  • , Taehoon Lee
  • , In Sung Park
  • , Ju Young Yun

Research output: Contribution to journal › Article › peer-review

24 Scopus citations

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