Skip to main navigation Skip to search Skip to main content

Effect of growth temperature on the structural and electrical properties of ZrO2 films fabricated by atomic layer deposition using a CpZr[N(CH3)2]3/C7H8 cocktail precursor

  • Jong Ki An
  • , Nak Kwan Chung
  • , Jin Tae Kim
  • , Sung Ho Hahm
  • , Geunsu Lee
  • , Sung Bo Lee
  • , Taehoon Lee
  • , In Sung Park
  • , Ju Young Yun
  • Kyungpook National University
  • Korea Research Institute of Standards and Science
  • University of Science and Technology UST
  • Eugene Technology Materials
  • Seoul National University
  • Hanyang University

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Fingerprint

Dive into the research topics of 'Effect of growth temperature on the structural and electrical properties of ZrO2 films fabricated by atomic layer deposition using a CpZr[N(CH3)2]3/C7H8 cocktail precursor'. Together they form a unique fingerprint.
Sort by

Engineering

Material Science