Effect of Mixing Ratio and Heating Rate on Sintering Properties of SiO₂/Glass Composite

It is necessary to develop a low-loss dielectric material based on the low-temperature co-fired ceramic (LTCC) process, which is essential for expanding 5G service. LTCC is designed by mixing SiO₂ and glass to secure low dielectric constant. The density, porosity, and average diameter of pores of the sintered specimen are analyzed and evaluated to confirm the change in sintering behavior according to the mixing composition ratio of SiO₂ and glass and the heating rate. When the ratio of the mixed filler is 35 vol%, the density is the highest at 2.30 g cm⁻³, the porosity is the lowest at 4.59%, and the diameter of the pores is also the smallest at about 5.80 μm. Therefore, it is selected as the optimal mixing ratio. When the heating rate is used as a variable, the density is high in 1, 3, and 5 °C min⁻¹, and the porosity and pore diameter are small. However, it is confirmed that as the heating rate increases, the density gradually decreases, while the porosity as well as pore diameter increases. As a result of analyzing the sample under the optimal conditions, the dielectric constant 3.64 and loss 0.01 are shown in 30 GHz.