Effect of nitrogen doping on variability of TaOx-RRAM for low-power 3-bit MLC applications

  • Saiful Haque Misha
  • , Nusrat Tamanna
  • , Jiyong Woo
  • , Sangheon Lee
  • , Jeonghwan Song
  • , Jaesung Park
  • , Seokjae Lim
  • , Jaehyuk Park
  • , Hyunsang Hwang

Research output: Contribution to journalArticlepeer-review

51 Scopus citations

Abstract

The switching uniformity and reliability of the TaOx based resistive random access memory (RRAM) device were investigated with varying nitrogen doping concentration. The nitrogen doped samples shows excellent electrical and reliability characteristics such as small switching variability for 3-bit multilevel per cell (MLC), low power operation and good retention properties. Compared with control sample, improved device characteristics of nitrogen doped device can be explained by nitrogen induced filament confinement.

Original languageEnglish
Pages (from-to)P25-P28
JournalECS Solid State Letters
Volume4
Issue number3
DOIs
StatePublished - 2015

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