Effect of ozone cleaning on Pt/Au and W/Pt/Au Schottky contacts to n-type ZnO

K. Ip; B. P. Gila; A. H. Onstine; E. S. Lambers; Y. W. Heo; K. H. Baik; D. P. Norton; S. J. Pearton; S. Kim; J. R. LaRoche; F. Ren

doi:10.1016/j.apsusc.2004.05.013

Effect of ozone cleaning on Pt/Au and W/Pt/Au Schottky contacts to n-type ZnO

K. Ip, B. P. Gila, A. H. Onstine, E. S. Lambers, Y. W. Heo, K. H. Baik, D. P. Norton, S. J. Pearton, S. Kim, J. R. LaRoche, F. Ren

University of Florida

Research output: Contribution to journal › Article › peer-review

32 Scopus citations

Abstract

The role of UV ozone cleaning on the characteristics of Pt contacts on n-type (n∼10 ¹⁷ cm ^-3 ) bulk single-crystal zinc oxide (ZnO) is reported. The contacts are Ohmic for samples that were not exposed to ozone prior to Pt deposition, but exhibit excellent rectifying behavior with ozone cleaning. The barrier height of these contacts obtained from current-voltage measurements was 0.70±0.04eV at 25°C with an ideality factor of 1.49 and a saturation current density of 6.17 × 10 ^-6 Acm ^-2 . There is a significant decrease in surface carbon concentration after the ozone cleaning (29.5at.% down to 5.8at.%, as determined from Auger electron spectroscopy). The measured barrier height for Pt on ZnO is similar to the value reported for both Au and Ag rectifying contacts on this material. By sharp contrast, sputter-deposited W contacts are Ohmic, independent of the use of ozone cleaning and become rectifying after 700°C annealing to repair sputter-induced damage. The barrier height is ∼ 0.45-0.49eV, with the ozone cleaning producing values at the high end of this range.

Original language	English
Pages (from-to)	387-393
Number of pages	7
Journal	Applied Surface Science
Volume	236
Issue number	1-4
DOIs	https://doi.org/10.1016/j.apsusc.2004.05.013
State	Published - 15 Sep 2004

Keywords

Barrier height
N-type ZnO
UV ozone cleaning

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10.1016/j.apsusc.2004.05.013

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@article{469d70a9ca50473eaedb34f29af091bc,

title = "Effect of ozone cleaning on Pt/Au and W/Pt/Au Schottky contacts to n-type ZnO",

abstract = " The role of UV ozone cleaning on the characteristics of Pt contacts on n-type (n∼10 17 cm -3 ) bulk single-crystal zinc oxide (ZnO) is reported. The contacts are Ohmic for samples that were not exposed to ozone prior to Pt deposition, but exhibit excellent rectifying behavior with ozone cleaning. The barrier height of these contacts obtained from current-voltage measurements was 0.70±0.04eV at 25°C with an ideality factor of 1.49 and a saturation current density of 6.17 × 10 -6 Acm -2 . There is a significant decrease in surface carbon concentration after the ozone cleaning (29.5at.% down to 5.8at.%, as determined from Auger electron spectroscopy). The measured barrier height for Pt on ZnO is similar to the value reported for both Au and Ag rectifying contacts on this material. By sharp contrast, sputter-deposited W contacts are Ohmic, independent of the use of ozone cleaning and become rectifying after 700°C annealing to repair sputter-induced damage. The barrier height is ∼ 0.45-0.49eV, with the ozone cleaning producing values at the high end of this range.",

keywords = "Barrier height, N-type ZnO, UV ozone cleaning",

author = "K. Ip and Gila, {B. P.} and Onstine, {A. H.} and Lambers, {E. S.} and Heo, {Y. W.} and Baik, {K. H.} and Norton, {D. P.} and Pearton, {S. J.} and S. Kim and LaRoche, {J. R.} and F. Ren",

year = "2004",

month = sep,

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doi = "10.1016/j.apsusc.2004.05.013",

language = "English",

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journal = "Applied Surface Science",

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T1 - Effect of ozone cleaning on Pt/Au and W/Pt/Au Schottky contacts to n-type ZnO

AU - Ip, K.

AU - Gila, B. P.

AU - Onstine, A. H.

AU - Lambers, E. S.

AU - Heo, Y. W.

AU - Baik, K. H.

AU - Norton, D. P.

AU - Pearton, S. J.

AU - Kim, S.

AU - LaRoche, J. R.

AU - Ren, F.

PY - 2004/9/15

Y1 - 2004/9/15

N2 - The role of UV ozone cleaning on the characteristics of Pt contacts on n-type (n∼10 17 cm -3 ) bulk single-crystal zinc oxide (ZnO) is reported. The contacts are Ohmic for samples that were not exposed to ozone prior to Pt deposition, but exhibit excellent rectifying behavior with ozone cleaning. The barrier height of these contacts obtained from current-voltage measurements was 0.70±0.04eV at 25°C with an ideality factor of 1.49 and a saturation current density of 6.17 × 10 -6 Acm -2 . There is a significant decrease in surface carbon concentration after the ozone cleaning (29.5at.% down to 5.8at.%, as determined from Auger electron spectroscopy). The measured barrier height for Pt on ZnO is similar to the value reported for both Au and Ag rectifying contacts on this material. By sharp contrast, sputter-deposited W contacts are Ohmic, independent of the use of ozone cleaning and become rectifying after 700°C annealing to repair sputter-induced damage. The barrier height is ∼ 0.45-0.49eV, with the ozone cleaning producing values at the high end of this range.

AB - The role of UV ozone cleaning on the characteristics of Pt contacts on n-type (n∼10 17 cm -3 ) bulk single-crystal zinc oxide (ZnO) is reported. The contacts are Ohmic for samples that were not exposed to ozone prior to Pt deposition, but exhibit excellent rectifying behavior with ozone cleaning. The barrier height of these contacts obtained from current-voltage measurements was 0.70±0.04eV at 25°C with an ideality factor of 1.49 and a saturation current density of 6.17 × 10 -6 Acm -2 . There is a significant decrease in surface carbon concentration after the ozone cleaning (29.5at.% down to 5.8at.%, as determined from Auger electron spectroscopy). The measured barrier height for Pt on ZnO is similar to the value reported for both Au and Ag rectifying contacts on this material. By sharp contrast, sputter-deposited W contacts are Ohmic, independent of the use of ozone cleaning and become rectifying after 700°C annealing to repair sputter-induced damage. The barrier height is ∼ 0.45-0.49eV, with the ozone cleaning producing values at the high end of this range.

KW - Barrier height

KW - N-type ZnO

KW - UV ozone cleaning

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DO - 10.1016/j.apsusc.2004.05.013

M3 - Article

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SN - 0169-4332

VL - 236

SP - 387

EP - 393

JO - Applied Surface Science

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IS - 1-4

ER -

Effect of ozone cleaning on Pt/Au and W/Pt/Au Schottky contacts to n-type ZnO

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Keywords

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