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Effect of the number and distribution of Al2O3 atomic layer deposition cycles within HfO2 layer on ferroelectric characteristics

  • Hyoungjin Park
  • , Jiae Jeong
  • , Hyun Wook Kim
  • , Eunryeong Hong
  • , Nayeon Kim
  • , Seonuk Jeon
  • , Yunsur Kim
  • , Hyeonsik Choi
  • , Jiyong Woo
  • Kyungpook National University

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

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