Effect of thermal-oxidized tin black filter on SnO2 gas sensors

O. Shik Kwon; Sook I. Hwang; Chang Hyun Shim; Bong Chull Kim; Gi Hong Rue; Jeung Soo Huh; Duk Dong Lee

doi:10.1016/S0925-4005(02)00458-6

Effect of thermal-oxidized tin black filter on SnO₂ gas sensors

O. Shik Kwon, Sook I. Hwang, Chang Hyun Shim, Bong Chull Kim, Gi Hong Rue, Jeung Soo Huh, Duk Dong Lee

Kyungpook National University

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

Two different sensors were prepared with and without an oxidized tin black filter, and then the effect of the filter on detecting the properties of hydrocarbon gases was investigated. The oxidized tin black filter was prepared by Sn thermal evaporation in a low vacuum, Ar atmosphere of 0.6Torr. Thereafter, the tin black film was oxidized at an operating temperature of 600°C to maximize the chemical filtering effect. The SnO₂ sensing layer under the filter was prepared by the thermal oxidation of metallic tin film with a 2000Å thickness. Morphologically, the oxidized tin black filter exhibited a high porous and foam structure. The addition of a filter to the tin oxide sensing layer had a positive effect on the selectivity towards CH₄ in comparison with iso-C₄H₁₀ and C₃H₈.

Original language	English
Pages (from-to)	158-163
Number of pages	6
Journal	Sensors and Actuators, B: Chemical
Volume	89
Issue number	1-2
DOIs	https://doi.org/10.1016/S0925-4005(02)00458-6
State	Published - 1 Mar 2003

Keywords

Gas sensors
Selectivity
Thermal oxidation
Tin black filter

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10.1016/S0925-4005(02)00458-6

Cite this

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title = "Effect of thermal-oxidized tin black filter on SnO2 gas sensors",

abstract = "Two different sensors were prepared with and without an oxidized tin black filter, and then the effect of the filter on detecting the properties of hydrocarbon gases was investigated. The oxidized tin black filter was prepared by Sn thermal evaporation in a low vacuum, Ar atmosphere of 0.6Torr. Thereafter, the tin black film was oxidized at an operating temperature of 600°C to maximize the chemical filtering effect. The SnO2 sensing layer under the filter was prepared by the thermal oxidation of metallic tin film with a 2000{\AA} thickness. Morphologically, the oxidized tin black filter exhibited a high porous and foam structure. The addition of a filter to the tin oxide sensing layer had a positive effect on the selectivity towards CH4 in comparison with iso-C4H10 and C3H8.",

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T1 - Effect of thermal-oxidized tin black filter on SnO2 gas sensors

AU - Kwon, O. Shik

AU - Hwang, Sook I.

AU - Shim, Chang Hyun

AU - Kim, Bong Chull

AU - Rue, Gi Hong

AU - Huh, Jeung Soo

AU - Lee, Duk Dong

PY - 2003/3/1

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N2 - Two different sensors were prepared with and without an oxidized tin black filter, and then the effect of the filter on detecting the properties of hydrocarbon gases was investigated. The oxidized tin black filter was prepared by Sn thermal evaporation in a low vacuum, Ar atmosphere of 0.6Torr. Thereafter, the tin black film was oxidized at an operating temperature of 600°C to maximize the chemical filtering effect. The SnO2 sensing layer under the filter was prepared by the thermal oxidation of metallic tin film with a 2000Å thickness. Morphologically, the oxidized tin black filter exhibited a high porous and foam structure. The addition of a filter to the tin oxide sensing layer had a positive effect on the selectivity towards CH4 in comparison with iso-C4H10 and C3H8.

AB - Two different sensors were prepared with and without an oxidized tin black filter, and then the effect of the filter on detecting the properties of hydrocarbon gases was investigated. The oxidized tin black filter was prepared by Sn thermal evaporation in a low vacuum, Ar atmosphere of 0.6Torr. Thereafter, the tin black film was oxidized at an operating temperature of 600°C to maximize the chemical filtering effect. The SnO2 sensing layer under the filter was prepared by the thermal oxidation of metallic tin film with a 2000Å thickness. Morphologically, the oxidized tin black filter exhibited a high porous and foam structure. The addition of a filter to the tin oxide sensing layer had a positive effect on the selectivity towards CH4 in comparison with iso-C4H10 and C3H8.

KW - Gas sensors

KW - Selectivity

KW - Thermal oxidation

KW - Tin black filter

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Effect of thermal-oxidized tin black filter on SnO₂ gas sensors

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Keywords

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