Effect of ZnO and TiO                         2                          doping on the sintering behavior of Y                         2                         O                         3                          ceramics

Changhun Kim; Doyun Lee; Jung A. Lee; Joon Hyung Lee; Young Woo Heo; Jeong Joo Kim

doi:10.1016/j.ceramint.2019.04.021

Effect of ZnO and TiO ₂ doping on the sintering behavior of Y ₂ O ₃ ceramics

Changhun Kim, Doyun Lee, Jung A. Lee, Joon Hyung Lee, Young Woo Heo, Jeong Joo Kim

Kyungpook National University

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

Full densification of Y ₂ O ₃ is challenging and requires a very high sintering temperature (above 1700 °C). In this study, the effect of ZnO and TiO ₂ dopants on its densification was investigated, showing that both dopants lowered the sintering temperature and improved the process. Moreover, ZnO promoted the grain growth, while TiO ₂ inhibited it; hence, the ZnO[sbnd]TiO ₂ co-doping and the change in the ZnO/TiO ₂ ratio allowed the control of the sintered body microstructure while maintaining high densification. Since Y ₂ O ₃ has a higher plasma erosion resistance than conventional Si-based materials, the plasma dry etching resistance of the sintered Y ₂ O ₃ was also evaluated and found superior due to the improved densification and controlled grain size of the doped samples.

Original language	English
Pages (from-to)	13315-13318
Number of pages	4
Journal	Ceramics International
Volume	45
Issue number	10
DOIs	https://doi.org/10.1016/j.ceramint.2019.04.021
State	Published - Jul 2019

Keywords

Doping
Plasma etching resistance
Sintering
Y O

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10.1016/j.ceramint.2019.04.021

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Kim, C., Lee, D., Lee, J. A., Lee, J. H., Heo, Y. W., & Kim, J. J. (2019). Effect of ZnO and TiO ₂ doping on the sintering behavior of Y ₂ O ₃ ceramics Ceramics International, 45(10), 13315-13318. https://doi.org/10.1016/j.ceramint.2019.04.021

Kim, Changhun ; Lee, Doyun ; Lee, Jung A. et al. / Effect of ZnO and TiO ₂ doping on the sintering behavior of Y ₂ O ₃ ceramics In: Ceramics International. 2019 ; Vol. 45, No. 10. pp. 13315-13318.

@article{c885ae76ed16489eb300e02b64e91e77,

title = " Effect of ZnO and TiO 2 doping on the sintering behavior of Y 2 O 3 ceramics ",

abstract = " Full densification of Y 2 O 3 is challenging and requires a very high sintering temperature (above 1700 °C). In this study, the effect of ZnO and TiO 2 dopants on its densification was investigated, showing that both dopants lowered the sintering temperature and improved the process. Moreover, ZnO promoted the grain growth, while TiO 2 inhibited it; hence, the ZnO[sbnd]TiO 2 co-doping and the change in the ZnO/TiO 2 ratio allowed the control of the sintered body microstructure while maintaining high densification. Since Y 2 O 3 has a higher plasma erosion resistance than conventional Si-based materials, the plasma dry etching resistance of the sintered Y 2 O 3 was also evaluated and found superior due to the improved densification and controlled grain size of the doped samples.",

keywords = "Doping, Plasma etching resistance, Sintering, Y O",

author = "Changhun Kim and Doyun Lee and Lee, {Jung A.} and Lee, {Joon Hyung} and Heo, {Young Woo} and Kim, {Jeong Joo}",

note = "Publisher Copyright: {\textcopyright} 2019 Elsevier Ltd and Techna Group S.r.l.",

year = "2019",

month = jul,

doi = "10.1016/j.ceramint.2019.04.021",

language = "English",

volume = "45",

pages = "13315--13318",

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}

Kim, C, Lee, D, Lee, JA, Lee, JH , Heo, YW & Kim, JJ 2019, ' Effect of ZnO and TiO ₂ doping on the sintering behavior of Y ₂ O ₃ ceramics ', Ceramics International, vol. 45, no. 10, pp. 13315-13318. https://doi.org/10.1016/j.ceramint.2019.04.021

Effect of ZnO and TiO ₂ doping on the sintering behavior of Y ₂ O ₃ ceramics . / Kim, Changhun; Lee, Doyun; Lee, Jung A. et al.
In: Ceramics International, Vol. 45, No. 10, 07.2019, p. 13315-13318.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Effect of ZnO and TiO 2 doping on the sintering behavior of Y 2 O 3 ceramics

AU - Kim, Changhun

AU - Lee, Doyun

AU - Lee, Jung A.

AU - Lee, Joon Hyung

AU - Heo, Young Woo

AU - Kim, Jeong Joo

PY - 2019/7

Y1 - 2019/7

N2 - Full densification of Y 2 O 3 is challenging and requires a very high sintering temperature (above 1700 °C). In this study, the effect of ZnO and TiO 2 dopants on its densification was investigated, showing that both dopants lowered the sintering temperature and improved the process. Moreover, ZnO promoted the grain growth, while TiO 2 inhibited it; hence, the ZnO[sbnd]TiO 2 co-doping and the change in the ZnO/TiO 2 ratio allowed the control of the sintered body microstructure while maintaining high densification. Since Y 2 O 3 has a higher plasma erosion resistance than conventional Si-based materials, the plasma dry etching resistance of the sintered Y 2 O 3 was also evaluated and found superior due to the improved densification and controlled grain size of the doped samples.

AB - Full densification of Y 2 O 3 is challenging and requires a very high sintering temperature (above 1700 °C). In this study, the effect of ZnO and TiO 2 dopants on its densification was investigated, showing that both dopants lowered the sintering temperature and improved the process. Moreover, ZnO promoted the grain growth, while TiO 2 inhibited it; hence, the ZnO[sbnd]TiO 2 co-doping and the change in the ZnO/TiO 2 ratio allowed the control of the sintered body microstructure while maintaining high densification. Since Y 2 O 3 has a higher plasma erosion resistance than conventional Si-based materials, the plasma dry etching resistance of the sintered Y 2 O 3 was also evaluated and found superior due to the improved densification and controlled grain size of the doped samples.

KW - Doping

KW - Plasma etching resistance

KW - Sintering

KW - Y O

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U2 - 10.1016/j.ceramint.2019.04.021

DO - 10.1016/j.ceramint.2019.04.021

M3 - Article

AN - SCOPUS:85063759696

SN - 0272-8842

VL - 45

SP - 13315

EP - 13318

JO - Ceramics International

JF - Ceramics International

IS - 10

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Kim C, Lee D, Lee JA, Lee JH , Heo YW, Kim JJ. Effect of ZnO and TiO ₂ doping on the sintering behavior of Y ₂ O ₃ ceramics Ceramics International. 2019 Jul;45(10):13315-13318. doi: 10.1016/j.ceramint.2019.04.021

Effect of ZnO and TiO ₂ doping on the sintering behavior of Y ₂ O ₃ ceramics

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Keywords

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