Abstract
A carbon-based ultrathin surface layer was uniformly incorporated onto the poly-Si cathode-tip surface via the FASAC process and the initial phase of carbon clusters was a graphitelike or sp2-bonded amorphous structure resulting in a surface work function of 3-4 eV. With the FASAC process initiated by field activation of preincorporated carbon clusters of ∼100 Å the surface carbons were redistributed onto the near tip surface and also transformed into an sp3-bonded amorphous layer structure resulting in a surface work function of ∼0.1 eV.
Original language | English |
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Pages (from-to) | 511-514 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 21 |
Issue number | 1 SPEC. |
DOIs | |
State | Published - Jan 2003 |