Electrical behavior of field-emission device with C-base surface layer

Myoung Bok Lee, Ki Rock Kwon, Jae Hoon Lee, Sung Ho Hahm, Jung Hee Lee

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

A carbon-based ultrathin surface layer was uniformly incorporated onto the poly-Si cathode-tip surface via the FASAC process and the initial phase of carbon clusters was a graphitelike or sp2-bonded amorphous structure resulting in a surface work function of 3-4 eV. With the FASAC process initiated by field activation of preincorporated carbon clusters of ∼100 Å the surface carbons were redistributed onto the near tip surface and also transformed into an sp3-bonded amorphous layer structure resulting in a surface work function of ∼0.1 eV.

Original languageEnglish
Pages (from-to)511-514
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number1 SPEC.
DOIs
StatePublished - Jan 2003

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