Abstract
A carbon-based ultrathin surface layer was uniformly incorporated onto the poly-Si cathode-tip surface via the FASAC process and the initial phase of carbon clusters was a graphitelike or sp2-bonded amorphous structure resulting in a surface work function of 3-4 eV. With the FASAC process initiated by field activation of preincorporated carbon clusters of ∼100 Å the surface carbons were redistributed onto the near tip surface and also transformed into an sp3-bonded amorphous layer structure resulting in a surface work function of ∼0.1 eV.
| Original language | English |
|---|---|
| Pages (from-to) | 511-514 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 21 |
| Issue number | 1 SPEC. |
| DOIs | |
| State | Published - Jan 2003 |