Abstract
In recent years, some efforts have been made in our laboratory to improve the performance of previously reported electrolyte-based tilt sensors. Even though the previously reported electrolytic tilt sensors have merits of low cost and a simple fabrication process, they show several undesirable performances such as inconsistent response time and slow reversion when it returns to the initial position (inclination angle of 0°) from an arbitrary tilted position. The irregular performances are caused by the flat upper cover. In this paper, we report the design and fabrication of an electrolytic tilt sensor with a domed cap for improving the response time and instant reversion. For a fast and regular reversion, the cavities on the cap substrate have been designed to be a domed shape. The measured reversion time with the proposed tilt sensor from 10 ° to the initial state was approximately 0.3 s, which is more than 6 times faster than the previously reported one.
| Original language | English |
|---|---|
| Article number | 06GL13 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 52 |
| Issue number | 6 PART 2 |
| DOIs | |
| State | Published - Jun 2013 |