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Electromagnetically controlled convex micromirror for focal length variation

  • Kyungpook National University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

An electromagnetically controlled varifocal convex micromirror has been fabricated using MEMS technology. The mirror has a 5 mm × 5 mm square aperture and the planer thin reflecting metal-coated mirror surface curvature is maintained electromagnetically by means of using repulsive force of two magnets. The mirror membrane has a maximum of 18.98 micrometer displacement that ensures significantly larger back-focal length variation from 493.8 cm to 8.2 cm, using a maximum controlling current of 700 mA. This micromirror can be used in reflective optical applications where larger back-focal variation is mostly demanded.

Original languageEnglish
Title of host publication2015 IEEE SENSORS - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479982028
DOIs
StatePublished - 31 Dec 2015
Event14th IEEE SENSORS - Busan, Korea, Republic of
Duration: 1 Nov 20154 Nov 2015

Publication series

Name2015 IEEE SENSORS - Proceedings

Conference

Conference14th IEEE SENSORS
Country/TerritoryKorea, Republic of
CityBusan
Period1/11/154/11/15

Keywords

  • adaptive optics
  • convex micromirror
  • deformable mirror
  • electromagnetic actuation
  • focal length variation

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