Experimental and Simulation Study on the Electrical Characteristics of Proton-irradiated AlGaN/GaN HEMT

So Ra Jeon, Sang Ho Lee, Jin Park, Min Seok Kim, Seung Ji Bae, Jeong Woo Hong, Won Suk Koh, Gang San Yun, In Man Kang, Young Jun Yoon

Research output: Contribution to journalArticlepeer-review

Abstract

In this study, we conducted an irradiation experiment using protons with 5 MeV energy and a fluence of 5 × 1013 cm−2 to analyze the effects on AlGaN/GaN high electron-mobility transistors (HEMTs). After proton irradiation, the on-resistance (Ron) value increased by 57%, the on-state current (Ion) decreased by 26.78%, and the off-state current (Ioff) increased by 89.63%. Despite these changes in Ion and Ioff, there was no significant change in the threshold voltage (Vt). This indicates that the two-dimensional electronic gas (2DEG) density, which determines Vt did not sustain significant damage. The degradation in device characteristics was attributed to other factors, which were analyzed through a resistance-based equation. Additionally, we performed simulation fitting to complete a quantitative cause analysis. We believe that our findings will contribute to preliminary verification research for high-reliability experiments, such as space and aviation semiconductors.

Original languageEnglish
Pages (from-to)21-29
Number of pages9
JournalJournal of Semiconductor Technology and Science
Volume25
Issue number1
DOIs
StatePublished - 2025

Keywords

  • AlGaN/GaN HEMT
  • proton irradiation effects
  • reliability analysis
  • simulation modeling

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