Fabrication and characterization of micro-gas sensor for nitrogen oxides gas detection

Dae Sik Lee; Jun Woo Lim; Sang Mun Lee; Jeung Soo Huh; Duk Dong Lee

doi:10.1016/S0925-4005(99)00479-7

Fabrication and characterization of micro-gas sensor for nitrogen oxides gas detection

Dae Sik Lee, Jun Woo Lim, Sang Mun Lee, Jeung Soo Huh, Duk Dong Lee

Kyungpook National University

Research output: Contribution to journal › Conference article › peer-review

40 Scopus citations

Abstract

WO₃-based thin film micro-gas sensor was fabricated and the NO_x gas sensing as well as electrical properties have been investigated. To obtain the optimal heat distribution, the structure of micro-hot plate was designed from the result of finite element simulation and was prepared by backside etching with KOH solution. The micro-hot plate was made out of N/O/N diaphragm with the thickness of 0.6 nm and area of 1.5 × 1.5 mm². The power consumption to maintain the device temperature of 300°C was about 60 mW. WO₃ thin film was thermally evaporated on micro-diaphragm. The film exhibited a fast response to NO₂ gas and the relationship between sensitivity and NO₂ concentration showed good linearity in the gas concentration range of 0-30 ppm NO₂. The sensitivity of micro-gas sensor to NO_x was correlated with the microstructure of the thin film.

Original language	English
Pages (from-to)	31-36
Number of pages	6
Journal	Sensors and Actuators, B: Chemical
Volume	64
Issue number	1-3
DOIs	https://doi.org/10.1016/S0925-4005(99)00479-7
State	Published - 10 Jun 2000
Event	Transducers '99 - 10th International Conference on Solid-State Sensors and Actuators - Sendai, Japan Duration: 7 Jun 1999 → 10 Jun 1999

Keywords

Micro-gas sensor
Nitrogen oxide
Thermal evaporation
Tungsten trioxide

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10.1016/S0925-4005(99)00479-7

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title = "Fabrication and characterization of micro-gas sensor for nitrogen oxides gas detection",

abstract = "WO3-based thin film micro-gas sensor was fabricated and the NOx gas sensing as well as electrical properties have been investigated. To obtain the optimal heat distribution, the structure of micro-hot plate was designed from the result of finite element simulation and was prepared by backside etching with KOH solution. The micro-hot plate was made out of N/O/N diaphragm with the thickness of 0.6 nm and area of 1.5 × 1.5 mm2. The power consumption to maintain the device temperature of 300°C was about 60 mW. WO3 thin film was thermally evaporated on micro-diaphragm. The film exhibited a fast response to NO2 gas and the relationship between sensitivity and NO2 concentration showed good linearity in the gas concentration range of 0-30 ppm NO2. The sensitivity of micro-gas sensor to NOx was correlated with the microstructure of the thin film.",

keywords = "Micro-gas sensor, Nitrogen oxide, Thermal evaporation, Tungsten trioxide",

author = "Lee, {Dae Sik} and Lim, {Jun Woo} and Lee, {Sang Mun} and Huh, {Jeung Soo} and Lee, {Duk Dong}",

year = "2000",

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doi = "10.1016/S0925-4005(99)00479-7",

language = "English",

volume = "64",

pages = "31--36",

journal = "Sensors and Actuators, B: Chemical",

issn = "0925-4005",

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TY - JOUR

T1 - Fabrication and characterization of micro-gas sensor for nitrogen oxides gas detection

AU - Lee, Dae Sik

AU - Lim, Jun Woo

AU - Lee, Sang Mun

AU - Huh, Jeung Soo

AU - Lee, Duk Dong

PY - 2000/6/10

Y1 - 2000/6/10

N2 - WO3-based thin film micro-gas sensor was fabricated and the NOx gas sensing as well as electrical properties have been investigated. To obtain the optimal heat distribution, the structure of micro-hot plate was designed from the result of finite element simulation and was prepared by backside etching with KOH solution. The micro-hot plate was made out of N/O/N diaphragm with the thickness of 0.6 nm and area of 1.5 × 1.5 mm2. The power consumption to maintain the device temperature of 300°C was about 60 mW. WO3 thin film was thermally evaporated on micro-diaphragm. The film exhibited a fast response to NO2 gas and the relationship between sensitivity and NO2 concentration showed good linearity in the gas concentration range of 0-30 ppm NO2. The sensitivity of micro-gas sensor to NOx was correlated with the microstructure of the thin film.

AB - WO3-based thin film micro-gas sensor was fabricated and the NOx gas sensing as well as electrical properties have been investigated. To obtain the optimal heat distribution, the structure of micro-hot plate was designed from the result of finite element simulation and was prepared by backside etching with KOH solution. The micro-hot plate was made out of N/O/N diaphragm with the thickness of 0.6 nm and area of 1.5 × 1.5 mm2. The power consumption to maintain the device temperature of 300°C was about 60 mW. WO3 thin film was thermally evaporated on micro-diaphragm. The film exhibited a fast response to NO2 gas and the relationship between sensitivity and NO2 concentration showed good linearity in the gas concentration range of 0-30 ppm NO2. The sensitivity of micro-gas sensor to NOx was correlated with the microstructure of the thin film.

KW - Micro-gas sensor

KW - Nitrogen oxide

KW - Thermal evaporation

KW - Tungsten trioxide

UR - http://www.scopus.com/inward/record.url?scp=0003142817&partnerID=8YFLogxK

U2 - 10.1016/S0925-4005(99)00479-7

DO - 10.1016/S0925-4005(99)00479-7

M3 - Conference article

AN - SCOPUS:0003142817

SN - 0925-4005

VL - 64

SP - 31

EP - 36

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

IS - 1-3

T2 - Transducers '99 - 10th International Conference on Solid-State Sensors and Actuators

Y2 - 7 June 1999 through 10 June 1999

ER -

Fabrication and characterization of micro-gas sensor for nitrogen oxides gas detection

Abstract

Keywords

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