TY - JOUR
T1 - Fabrication and Evaluation of the MXene-Based Wearable Sensor
AU - Yoon, Youngsam
AU - Lee, Hojin
AU - Cha, Goeun
AU - Kim, Tae Wook
AU - Park, Jongsung
N1 - Publisher Copyright:
© 2023, Korean Sensors Society. All rights reserved.
PY - 2023/9
Y1 - 2023/9
N2 - Herein, we propose a simple fabrication method for MXene-coated V-groove sensors for applications. To enhance the sensitivity of this sensor, we applied MXene particles, instead of conventional metal layers, as a sensing material on the sensor's surface. This allows for an easier fabrication, as well as higher sensitivity of the sensor compared to those of our previously demonstrated metal-based V-groove sensor. Additionally, polyurethane-acrylate, a UV-curable liquid polymer, can be easily applied using micro-electromechanical systems-based surface-texture micromachining. The sensor sensitivity is approximately 0.08 /mm, and it can be improved by increasing the number of V-grooves. We believe that the proposed MXene-based wearable sensor offers a great potential in detecting various types of motions characteristic of human activities.
AB - Herein, we propose a simple fabrication method for MXene-coated V-groove sensors for applications. To enhance the sensitivity of this sensor, we applied MXene particles, instead of conventional metal layers, as a sensing material on the sensor's surface. This allows for an easier fabrication, as well as higher sensitivity of the sensor compared to those of our previously demonstrated metal-based V-groove sensor. Additionally, polyurethane-acrylate, a UV-curable liquid polymer, can be easily applied using micro-electromechanical systems-based surface-texture micromachining. The sensor sensitivity is approximately 0.08 /mm, and it can be improved by increasing the number of V-grooves. We believe that the proposed MXene-based wearable sensor offers a great potential in detecting various types of motions characteristic of human activities.
KW - Crack sensor
KW - MXene
KW - Semiconductor Fabrication
KW - Strain sensors
UR - http://www.scopus.com/inward/record.url?scp=85180668966&partnerID=8YFLogxK
U2 - 10.46670/JSST.2023.32.5.295
DO - 10.46670/JSST.2023.32.5.295
M3 - Article
AN - SCOPUS:85180668966
SN - 1225-5475
VL - 32
SP - 295
EP - 299
JO - Journal of Sensor Science and Technology
JF - Journal of Sensor Science and Technology
IS - 5
ER -