Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing

Jong Hee Kim; Byueng Su Yoo; Jae Heon Shin; Won Suk Han; O. Kyun Kwon; Youtig Gu Ju; Hyun Woo Song

doi:10.1143/JJAP.43.137

Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing

Jong Hee Kim, Byueng Su Yoo, Jae Heon Shin, Won Suk Han, O. Kyun Kwon, Youtig Gu Ju, Hyun Woo Song

Department of Physics Education

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5 Scopus citations

Abstract

We demonstrate a very precise cavity-mode control scheme in a 1.55 μm multiple-wavelength vertical-cavity surface-emitting laser (VCSEL) array. For the precise control of the cavity mode, selective wet etchings of InP and InAlGaAs superlattice tuning layers are investigated using HC1/H₂O and H₃PO₃/H₂O₂/H₂O solution systems, respectively. The average calibrated cavity-mode spacing between channels for the fabricated eight-channel full VCSEL array structure is approximately 0.9 nm, which agrees well with the calculated value of 0.8 nm.

Original language	English
Pages (from-to)	137-139
Number of pages	3
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	43
Issue number	1
DOIs	https://doi.org/10.1143/JJAP.43.137
State	Published - Jan 2004

Keywords

Cavity mode
InAlGaAs
InP
Laser array
MOCVD
Selective etching
Vertical-cavity surface-emitting laser (VCSEL)
WDM

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10.1143/JJAP.43.137

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Kim, J. H., Yoo, B. S., Shin, J. H., Han, W. S., Kwon, O. K., Ju, Y. G., & Song, H. W. (2004). Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 43(1), 137-139. https://doi.org/10.1143/JJAP.43.137

Kim, Jong Hee ; Yoo, Byueng Su ; Shin, Jae Heon et al. / Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2004 ; Vol. 43, No. 1. pp. 137-139.

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title = "Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing",

abstract = "We demonstrate a very precise cavity-mode control scheme in a 1.55 μm multiple-wavelength vertical-cavity surface-emitting laser (VCSEL) array. For the precise control of the cavity mode, selective wet etchings of InP and InAlGaAs superlattice tuning layers are investigated using HC1/H2O and H3PO3/H2O2/H2O solution systems, respectively. The average calibrated cavity-mode spacing between channels for the fabricated eight-channel full VCSEL array structure is approximately 0.9 nm, which agrees well with the calculated value of 0.8 nm.",

keywords = "Cavity mode, InAlGaAs, InP, Laser array, MOCVD, Selective etching, Vertical-cavity surface-emitting laser (VCSEL), WDM",

author = "Kim, \{Jong Hee\} and Yoo, \{Byueng Su\} and Shin, \{Jae Heon\} and Han, \{Won Suk\} and Kwon, \{O. Kyun\} and Ju, \{Youtig Gu\} and Song, \{Hyun Woo\}",

year = "2004",

month = jan,

doi = "10.1143/JJAP.43.137",

language = "English",

volume = "43",

pages = "137--139",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",

issn = "0021-4922",

publisher = "Institute of Physics",

number = "1",

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Kim, JH, Yoo, BS, Shin, JH, Han, WS, Kwon, OK, Ju, YG & Song, HW 2004, 'Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing', Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 43, no. 1, pp. 137-139. https://doi.org/10.1143/JJAP.43.137

Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing. / Kim, Jong Hee; Yoo, Byueng Su; Shin, Jae Heon et al.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 43, No. 1, 01.2004, p. 137-139.

Research output: Contribution to journal › Article › peer-review

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T1 - Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing

AU - Kim, Jong Hee

AU - Yoo, Byueng Su

AU - Shin, Jae Heon

AU - Han, Won Suk

AU - Kwon, O. Kyun

AU - Ju, Youtig Gu

AU - Song, Hyun Woo

PY - 2004/1

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N2 - We demonstrate a very precise cavity-mode control scheme in a 1.55 μm multiple-wavelength vertical-cavity surface-emitting laser (VCSEL) array. For the precise control of the cavity mode, selective wet etchings of InP and InAlGaAs superlattice tuning layers are investigated using HC1/H2O and H3PO3/H2O2/H2O solution systems, respectively. The average calibrated cavity-mode spacing between channels for the fabricated eight-channel full VCSEL array structure is approximately 0.9 nm, which agrees well with the calculated value of 0.8 nm.

AB - We demonstrate a very precise cavity-mode control scheme in a 1.55 μm multiple-wavelength vertical-cavity surface-emitting laser (VCSEL) array. For the precise control of the cavity mode, selective wet etchings of InP and InAlGaAs superlattice tuning layers are investigated using HC1/H2O and H3PO3/H2O2/H2O solution systems, respectively. The average calibrated cavity-mode spacing between channels for the fabricated eight-channel full VCSEL array structure is approximately 0.9 nm, which agrees well with the calculated value of 0.8 nm.

KW - Cavity mode

KW - InAlGaAs

KW - InP

KW - Laser array

KW - MOCVD

KW - Selective etching

KW - Vertical-cavity surface-emitting laser (VCSEL)

KW - WDM

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SN - 0021-4922

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 1

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Kim JH, Yoo BS, Shin JH, Han WS, Kwon OK, Ju YG et al. Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2004 Jan;43(1):137-139. doi: 10.1143/JJAP.43.137

Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing

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