Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing

Jong Hee Kim; Byueng Su Yoo; Jae Heon Shin; Won Suk Han; O. Kyun Kwon; Youtig Gu Ju; Hyun Woo Song

doi:10.1143/JJAP.43.137

Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing

Jong Hee Kim
, Byueng Su Yoo
, Jae Heon Shin
, Won Suk Han
, O. Kyun Kwon
, Youtig Gu Ju
, Hyun Woo Song

Department of Physics Education

Electronics and Telecommunications Research Institute
RayCan Co., Ltd.

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

We demonstrate a very precise cavity-mode control scheme in a 1.55 μm multiple-wavelength vertical-cavity surface-emitting laser (VCSEL) array. For the precise control of the cavity mode, selective wet etchings of InP and InAlGaAs superlattice tuning layers are investigated using HC1/H₂O and H₃PO₃/H₂O₂/H₂O solution systems, respectively. The average calibrated cavity-mode spacing between channels for the fabricated eight-channel full VCSEL array structure is approximately 0.9 nm, which agrees well with the calculated value of 0.8 nm.

Original language	English
Pages (from-to)	137-139
Number of pages	3
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	43
Issue number	1
DOIs	https://doi.org/10.1143/JJAP.43.137
State	Published - Jan 2004

Keywords

Cavity mode
InAlGaAs
InP
Laser array
MOCVD
Selective etching
Vertical-cavity surface-emitting laser (VCSEL)
WDM

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10.1143/JJAP.43.137

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Kim, J. H., Yoo, B. S., Shin, J. H., Han, W. S., Kwon, O. K., Ju, Y. G., & Song, H. W. (2004). Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 43(1), 137-139. https://doi.org/10.1143/JJAP.43.137

Kim, Jong Hee ; Yoo, Byueng Su ; Shin, Jae Heon et al. / Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2004 ; Vol. 43, No. 1. pp. 137-139.

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title = "Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing",

abstract = "We demonstrate a very precise cavity-mode control scheme in a 1.55 μm multiple-wavelength vertical-cavity surface-emitting laser (VCSEL) array. For the precise control of the cavity mode, selective wet etchings of InP and InAlGaAs superlattice tuning layers are investigated using HC1/H2O and H3PO3/H2O2/H2O solution systems, respectively. The average calibrated cavity-mode spacing between channels for the fabricated eight-channel full VCSEL array structure is approximately 0.9 nm, which agrees well with the calculated value of 0.8 nm.",

keywords = "Cavity mode, InAlGaAs, InP, Laser array, MOCVD, Selective etching, Vertical-cavity surface-emitting laser (VCSEL), WDM",

author = "Kim, \{Jong Hee\} and Yoo, \{Byueng Su\} and Shin, \{Jae Heon\} and Han, \{Won Suk\} and Kwon, \{O. Kyun\} and Ju, \{Youtig Gu\} and Song, \{Hyun Woo\}",

year = "2004",

month = jan,

doi = "10.1143/JJAP.43.137",

language = "English",

volume = "43",

pages = "137--139",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",

issn = "0021-4922",

publisher = "Institute of Physics",

number = "1",

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Kim, JH, Yoo, BS, Shin, JH, Han, WS, Kwon, OK, Ju, YG & Song, HW 2004, 'Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing', Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 43, no. 1, pp. 137-139. https://doi.org/10.1143/JJAP.43.137

Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing. / Kim, Jong Hee; Yoo, Byueng Su; Shin, Jae Heon et al.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 43, No. 1, 01.2004, p. 137-139.

Research output: Contribution to journal › Article › peer-review

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T1 - Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing

AU - Kim, Jong Hee

AU - Yoo, Byueng Su

AU - Shin, Jae Heon

AU - Han, Won Suk

AU - Kwon, O. Kyun

AU - Ju, Youtig Gu

AU - Song, Hyun Woo

PY - 2004/1

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N2 - We demonstrate a very precise cavity-mode control scheme in a 1.55 μm multiple-wavelength vertical-cavity surface-emitting laser (VCSEL) array. For the precise control of the cavity mode, selective wet etchings of InP and InAlGaAs superlattice tuning layers are investigated using HC1/H2O and H3PO3/H2O2/H2O solution systems, respectively. The average calibrated cavity-mode spacing between channels for the fabricated eight-channel full VCSEL array structure is approximately 0.9 nm, which agrees well with the calculated value of 0.8 nm.

AB - We demonstrate a very precise cavity-mode control scheme in a 1.55 μm multiple-wavelength vertical-cavity surface-emitting laser (VCSEL) array. For the precise control of the cavity mode, selective wet etchings of InP and InAlGaAs superlattice tuning layers are investigated using HC1/H2O and H3PO3/H2O2/H2O solution systems, respectively. The average calibrated cavity-mode spacing between channels for the fabricated eight-channel full VCSEL array structure is approximately 0.9 nm, which agrees well with the calculated value of 0.8 nm.

KW - Cavity mode

KW - InAlGaAs

KW - InP

KW - Laser array

KW - MOCVD

KW - Selective etching

KW - Vertical-cavity surface-emitting laser (VCSEL)

KW - WDM

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DO - 10.1143/JJAP.43.137

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SN - 0021-4922

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 1

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Kim JH, Yoo BS, Shin JH, Han WS, Kwon OK, Ju YG et al. Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2004 Jan;43(1):137-139. doi: 10.1143/JJAP.43.137

Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing

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