@inproceedings{03edf1ad55d344e68b588aa2b5a45bf1,
title = "Fabrication Method of Versatile Micro/Nano Hierarchical Structure and Its Usage as Superhydrophobic Flexible Film",
abstract = "In this research, we propose the fabrication method of versatile micro/nano hierarchical structures; Microstructuring was done by micro-molding of the polyimide (PI) varnish, and the nano-structuring was done by additional nano-transferring of the nickel (Ni) nanodot onto the PI microstructure and sequential reactive ion etching (RIE). Through the proposed method, we successfully fabricate the flexible film with a micro-pillar/nano-thumbtack hierarchical structure that shows the superhydrophobicity (water contact angle (WCA) of 171.26°).",
keywords = "Hierarchical Structure, Microstructure, Nanostructure, Superhydrophobicity",
author = "Yongrok Jeong and Junseong Ahn and Byeongmin Kang and Ha, \{Ji Hwan\} and Jiwoo Ko and Hwang, \{Soon Hyoung\} and Sohee Jeon and Jeong, \{Jun Ho\} and Inkyu Park",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "English",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1360--1363",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
address = "United States",
}