Fabrication of a bolometric infrared micro-spectrometer

Jae Chang Yang, Ju Chan Choi, Ho Jung, Seong Ho Kong

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The bolometric infrared spectrometer instantaneously detects the incoming IR spectra by detecting the decrease or increase of bolometer resistance due to its temperature change caused by the incident infrared light. In this paper, the design and fabrication methods of bolometric IR spectrometer are presented. The IR spectrometer reported in this paper consists of a bolometric IR detector array made of V2O5 and a grating structure used for separating incident infrared light depending on its wavelength.

Original languageEnglish
Title of host publicationESSDERC07 - 2007 37th European Solid State Device Research Conference
PublisherIEEE Computer Society
Pages374-377
Number of pages4
ISBN (Print)1424411238, 9781424411238
DOIs
StatePublished - 2007
EventESSDERC 2007 - 37th European Solid-State Device Research Conference - Munich, Germany
Duration: 11 Sep 200713 Sep 2007

Publication series

NameESSDERC 2007 - Proceedings of the 37th European Solid-State Device Research Conference
Volume2007

Conference

ConferenceESSDERC 2007 - 37th European Solid-State Device Research Conference
Country/TerritoryGermany
CityMunich
Period11/09/0713/09/07

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