Fabrication of a fused silica based mold for the microlenticular lens array using a femtosecond laser and a CO₂ laser

Many techniques have been suggested and investigated for the microlens array fabrication in three dimensional structures. We present the fabrication of a fused silica based mold for the microlenticular lens array using a femtosecond laser and a CO₂ laser. The three dimensional microlenticular array mold is surface-machined on a fused silica plate by a femtosecond laser and polished with a CO₂ laser. The CO₂ laser treatment process can be customized to obtain a smooth surface. To evaluate the performance of the fabricated glass mold, we replicated a PDMS microlenticular lens arrays from the fabricated glass micro lenticular array mold.