Fabrication of a MEMS-based PCR micro-reactor, using IR heating

Ki Sik Im, Seong Ho Kong, Jung Hee Lee, Jang Kyoo Shin, Jong Hyun Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Silicon and glass wafers were used as bottom and top of the device, respectively, to fabricate micro-electro-mechanical-systems (MEMS)-based polymerase chain reaction (PCR) micro-reactor by infrared (IR) heating. Successful patterning of the Pt sensor in 190μm-deep well was achieved by applying additional process steps to improve the uniformity of photoresist coating at the sharp convex and concave corners. The sharp corners were rounded off using two-step KOH etching, followed by maskless TMAH etching step. The bulk-silicon parts underneath and around the well were etched away from the back side resulting in a suspended PCR well by the inlet and outlet channels to minimize the thermal mass of the PCR well.

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
Pages250-251
Number of pages2
StatePublished - 2004
Event2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan
Duration: 26 Oct 200429 Oct 2004

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2004

Conference

Conference2004 International Microprocesses and Nanotechnology Conference
Country/TerritoryJapan
CityOsaka
Period26/10/0429/10/04

Fingerprint

Dive into the research topics of 'Fabrication of a MEMS-based PCR micro-reactor, using IR heating'. Together they form a unique fingerprint.

Cite this