@inproceedings{dbb69ebc0110473fa22e1fa564a98f34,
title = "Fabrication of a MEMS based symmetrically deformarle convex mirror",
abstract = "This paper presents a fabrication process of improved MEMS deformable convex micromirror system design in which a metalized polymer membrane is suspended on a uniform cylindrical air-filled cavity in order to obtain perfectly spherical convex shape, and a polycarbonate glass microstructure is used for easy adhesive bonding with PDMS membrane. The 3.5 mm diameter free standing circular membrane showed a 13.18 μm center deformation with symmetric spherical surface shape at applied current of 0.70 A to the electromagnetic solenoid. It was also investigated that the micromirror device could be integrated in beam guiding optical systems.",
author = "Hossain, {Md Mahabub} and Lee, {Jun Yeop} and Kong, {Seong Ho}",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",
year = "2017",
month = feb,
day = "23",
doi = "10.1109/MEMSYS.2017.7863493",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "656--658",
booktitle = "2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017",
address = "United States",
}