Fabrication of a micro-fluidic filter/channel using MEMS technology

Duk Soo Eun, Dae Young Kong, In Sik Yu, Hyun Jun Yoo, Young Myong Hong, Jong Min Jang, Pyung Choi, Seong Ho Kong, Jang Kyoo Shin, Jong Hyun Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We have designed and fabricated the micro-fluidic filter/channel using the methods that suggested in this paper. The micro-fluidic filter is fabricated by anodic reaction with (110) wafer. The most ideal micro-fluidic channel is fabricated by micro blaster process, and HNA solution etching. It is expected that proposed micro-fluidic filter/channel would likely be applied micro-fluidic systems that could classify necessary materials to react and measure.

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages346-347
Number of pages2
DOIs
StatePublished - 2007
Events20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan
Duration: 5 Nov 20078 Nov 2007

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Conference

Conferences20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/TerritoryJapan
CityKyoto
Period5/11/078/11/07

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