@inproceedings{20cba2d0704446b9b4aacc05ae12230a,
title = "Fabrication of a micro-fluidic filter/channel using MEMS technology",
abstract = "We have designed and fabricated the micro-fluidic filter/channel using the methods that suggested in this paper. The micro-fluidic filter is fabricated by anodic reaction with (110) wafer. The most ideal micro-fluidic channel is fabricated by micro blaster process, and HNA solution etching. It is expected that proposed micro-fluidic filter/channel would likely be applied micro-fluidic systems that could classify necessary materials to react and measure.",
author = "Eun, {Duk Soo} and Kong, {Dae Young} and Yu, {In Sik} and Yoo, {Hyun Jun} and Hong, {Young Myong} and Jang, {Jong Min} and Pyung Choi and Kong, {Seong Ho} and Shin, {Jang Kyoo} and Lee, {Jong Hyun}",
year = "2007",
doi = "10.1109/IMNC.2007.4456246",
language = "English",
isbn = "4990247248",
series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
pages = "346--347",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",
}