Fabrication of a micro-fluidic filter/channel using MEMS technology

Duk Soo Eun; Dae Young Kong; In Sik Yu; Hyun Jun Yoo; Young Myong Hong; Jong Min Jang; Pyung Choi; Seong Ho Kong; Jang Kyoo Shin; Jong Hyun Lee

doi:10.1109/IMNC.2007.4456246

Fabrication of a micro-fluidic filter/channel using MEMS technology

Duk Soo Eun
, Dae Young Kong
, In Sik Yu
, Hyun Jun Yoo
, Young Myong Hong
, Jong Min Jang
, Pyung Choi
, Seong Ho Kong
, Jang Kyoo Shin
, Jong Hyun Lee

School of Electronics Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We have designed and fabricated the micro-fluidic filter/channel using the methods that suggested in this paper. The micro-fluidic filter is fabricated by anodic reaction with (110) wafer. The most ideal micro-fluidic channel is fabricated by micro blaster process, and HNA solution etching. It is expected that proposed micro-fluidic filter/channel would likely be applied micro-fluidic systems that could classify necessary materials to react and measure.

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	346-347
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456246
State	Published - 2007
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: 5 Nov 2007 → 8 Nov 2007

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Conference

Conference	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/Territory	Japan
City	Kyoto
Period	5/11/07 → 8/11/07

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10.1109/IMNC.2007.4456246

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Eun, D. S., Kong, D. Y., Yu, I. S., Yoo, H. J., Hong, Y. M., Jang, J. M., Choi, P., Kong, S. H., Shin, J. K., & Lee, J. H. (2007). Fabrication of a micro-fluidic filter/channel using MEMS technology. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 346-347). Article 4456246 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456246

Eun, Duk Soo ; Kong, Dae Young ; Yu, In Sik et al. / Fabrication of a micro-fluidic filter/channel using MEMS technology. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 346-347 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

@inproceedings{20cba2d0704446b9b4aacc05ae12230a,

title = "Fabrication of a micro-fluidic filter/channel using MEMS technology",

abstract = "We have designed and fabricated the micro-fluidic filter/channel using the methods that suggested in this paper. The micro-fluidic filter is fabricated by anodic reaction with (110) wafer. The most ideal micro-fluidic channel is fabricated by micro blaster process, and HNA solution etching. It is expected that proposed micro-fluidic filter/channel would likely be applied micro-fluidic systems that could classify necessary materials to react and measure.",

author = "Eun, \{Duk Soo\} and Kong, \{Dae Young\} and Yu, \{In Sik\} and Yoo, \{Hyun Jun\} and Hong, \{Young Myong\} and Jang, \{Jong Min\} and Pyung Choi and Kong, \{Seong Ho\} and Shin, \{Jang Kyoo\} and Lee, \{Jong Hyun\}",

year = "2007",

doi = "10.1109/IMNC.2007.4456246",

language = "English",

isbn = "4990247248",

series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

pages = "346--347",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",

}

Eun, DS, Kong, DY, Yu, IS, Yoo, HJ, Hong, YM, Jang, JM, Choi, P, Kong, SH, Shin, JK & Lee, JH 2007, Fabrication of a micro-fluidic filter/channel using MEMS technology. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456246, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 346-347, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 5/11/07. https://doi.org/10.1109/IMNC.2007.4456246

Fabrication of a micro-fluidic filter/channel using MEMS technology. / Eun, Duk Soo; Kong, Dae Young; Yu, In Sik et al.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 346-347 4456246 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fabrication of a micro-fluidic filter/channel using MEMS technology

AU - Eun, Duk Soo

AU - Kong, Dae Young

AU - Yu, In Sik

AU - Yoo, Hyun Jun

AU - Hong, Young Myong

AU - Jang, Jong Min

AU - Choi, Pyung

AU - Kong, Seong Ho

AU - Shin, Jang Kyoo

AU - Lee, Jong Hyun

PY - 2007

Y1 - 2007

N2 - We have designed and fabricated the micro-fluidic filter/channel using the methods that suggested in this paper. The micro-fluidic filter is fabricated by anodic reaction with (110) wafer. The most ideal micro-fluidic channel is fabricated by micro blaster process, and HNA solution etching. It is expected that proposed micro-fluidic filter/channel would likely be applied micro-fluidic systems that could classify necessary materials to react and measure.

AB - We have designed and fabricated the micro-fluidic filter/channel using the methods that suggested in this paper. The micro-fluidic filter is fabricated by anodic reaction with (110) wafer. The most ideal micro-fluidic channel is fabricated by micro blaster process, and HNA solution etching. It is expected that proposed micro-fluidic filter/channel would likely be applied micro-fluidic systems that could classify necessary materials to react and measure.

UR - https://www.scopus.com/pages/publications/47349117667

U2 - 10.1109/IMNC.2007.4456246

DO - 10.1109/IMNC.2007.4456246

M3 - Conference contribution

AN - SCOPUS:47349117667

SN - 4990247248

SN - 9784990247249

T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

SP - 346

EP - 347

BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007

Y2 - 5 November 2007 through 8 November 2007

ER -

Eun DS, Kong DY, Yu IS, Yoo HJ, Hong YM, Jang JM et al. Fabrication of a micro-fluidic filter/channel using MEMS technology. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 346-347. 4456246. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). doi: 10.1109/IMNC.2007.4456246

Fabrication of a micro-fluidic filter/channel using MEMS technology

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