Fabrication of clinical gas sensor using MEMS process

The polyaniline (PANi) micro gas sensor was developed for medical application using the silicon process in order to detect ammonia odor of stomach inside. Fabricated sensor can be applied to medical purpose if it can detect the variation of ammonia concentration that is generated by Helicobacter pylori (H. pylori) living in stomach. Today, there are many ammonia sensors for various applications. However, no suitable clinical sensor exists. We started to study for fabrication of a suitable sensor. It is possible for PANi microsensor to use clinical application because it has a good sensitivity at room temperature and is harmless to human. For this sensor operated inside stomach, the bulk micromachining and silicon process were used to reduce sensor size. The mechanical well was made of SU-8 photoresistor in order to improve the adhesion of PANi film. The sensor will be introduced to medical filed for competitive power of medical indicators.