@inproceedings{b4bd044a94e742b392abbbfabc15183d,
title = "Fabrication of low frequency AC-DC thermal converter with a thermal mass",
abstract = "The development of thin-film or planar multijunction thermal converters for smaller ac-dc transfer of voltage and current at low frequencies was presented. A planar Chromel-Alumel multijunction thermal converter was fabricated on the LPCVD Si3N4/SiO2/Si3N4 (N/O/N)-diaphram, prepared by silicon bulk micromachining. A silicon obelisk integrator under the heater formed using KOH anisotropic etching. The values for the thermal time-constant, the ac-dc voltage transfer differences, and the current transfer differences are found to satisfy the specifications for the converter to be applied for ac standards.",
author = "Jung, {Su Lack} and Eun, {Duk Soo} and Kim, {Do Wook} and Kong, {Seong Ho} and Lee, {Jung Hee} and Shin, {Jang Kyoo} and Lee, {Jong Hyun}",
year = "2004",
language = "English",
isbn = "4990247205",
series = "Digest of Papers - Microprocesses and Nanotechnology 2004",
pages = "268--269",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2004",
note = "2004 International Microprocesses and Nanotechnology Conference ; Conference date: 26-10-2004 Through 29-10-2004",
}