Fabrication of low frequency AC-DC thermal converter with a thermal mass

Su Lack Jung, Duk Soo Eun, Do Wook Kim, Seong Ho Kong, Jung Hee Lee, Jang Kyoo Shin, Jong Hyun Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The development of thin-film or planar multijunction thermal converters for smaller ac-dc transfer of voltage and current at low frequencies was presented. A planar Chromel-Alumel multijunction thermal converter was fabricated on the LPCVD Si3N4/SiO2/Si3N4 (N/O/N)-diaphram, prepared by silicon bulk micromachining. A silicon obelisk integrator under the heater formed using KOH anisotropic etching. The values for the thermal time-constant, the ac-dc voltage transfer differences, and the current transfer differences are found to satisfy the specifications for the converter to be applied for ac standards.

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
Pages268-269
Number of pages2
StatePublished - 2004
Event2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan
Duration: 26 Oct 200429 Oct 2004

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2004

Conference

Conference2004 International Microprocesses and Nanotechnology Conference
Country/TerritoryJapan
CityOsaka
Period26/10/0429/10/04

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