Fabrication of low frequency AC-DC thermal converter with a thermal mass

Material Science

• Silicon Nitride 100%
• Thin Films 50%
• Silicon 50%
• Low Pressure Chemical Vapor Deposition 50%
• Micromachining 50%
• Anisotropic Etching 50%
• Chromel 50%
• Alumel 50%
• Bulk Silicon 50%

Engineering

• Thermal Converter 100%
• Micro Machining 33%
• Thin Films 33%
• Satisfies 33%
• Anisotropic 33%
• Constant Time 33%
• Dc Voltage 33%
• Chromel Alumel 33%
• Bulk Silicon 33%