Fabrication of micro probe-type electrodes for microelectro-chemical machining using microfabrication

W. B. Park; J. H. Choi; C. W. Park; G. M. Kim; H. S. Shin; C. N. Chu; B. H. Kim

doi:10.1142/S0217979210065398

Fabrication of micro probe-type electrodes for microelectro-chemical machining using microfabrication

W. B. Park, J. H. Choi, C. W. Park, G. M. Kim, H. S. Shin, C. N. Chu, B. H. Kim

School of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

In this study, the mass fabrication of microelectrode tools for microelectrochemical machining (MECM) was studied using microfabrication processes. The cantilever type geometry of microelectrodes was defined by photolithography processes, and metal patterns were made for electrical contacts. Various fabrication processes were studied for the fabrication of microelectrode tools, such as wet etching, lift-off, and electroforming for metal layer patterning. MECM test results showed feasibility of the fabricated electrode tools. The microfabricated electrodes can be used as micromachining tools for various electrical micromachining of steel mold and parts of microdevices.

Original language	English
Pages (from-to)	2639-2644
Number of pages	6
Journal	International Journal of Modern Physics B
Volume	24
Issue number	15-16
DOIs	https://doi.org/10.1142/S0217979210065398
State	Published - 30 Jun 2010

Keywords

Micro-electro-chemical machining (MECM)
micro-electrode
microfabrication

Access to Document

10.1142/S0217979210065398

Cite this

@article{5c922f59843248af9060842fc263940d,

title = "Fabrication of micro probe-type electrodes for microelectro-chemical machining using microfabrication",

abstract = "In this study, the mass fabrication of microelectrode tools for microelectrochemical machining (MECM) was studied using microfabrication processes. The cantilever type geometry of microelectrodes was defined by photolithography processes, and metal patterns were made for electrical contacts. Various fabrication processes were studied for the fabrication of microelectrode tools, such as wet etching, lift-off, and electroforming for metal layer patterning. MECM test results showed feasibility of the fabricated electrode tools. The microfabricated electrodes can be used as micromachining tools for various electrical micromachining of steel mold and parts of microdevices.",

keywords = "Micro-electro-chemical machining (MECM), micro-electrode, microfabrication",

author = "Park, {W. B.} and Choi, {J. H.} and Park, {C. W.} and Kim, {G. M.} and Shin, {H. S.} and Chu, {C. N.} and Kim, {B. H.}",

year = "2010",

month = jun,

day = "30",

doi = "10.1142/S0217979210065398",

language = "English",

volume = "24",

pages = "2639--2644",

journal = "International Journal of Modern Physics B",

issn = "0217-9792",

publisher = "World Scientific",

number = "15-16",

}

TY - JOUR

T1 - Fabrication of micro probe-type electrodes for microelectro-chemical machining using microfabrication

AU - Park, W. B.

AU - Choi, J. H.

AU - Park, C. W.

AU - Kim, G. M.

AU - Shin, H. S.

AU - Chu, C. N.

AU - Kim, B. H.

PY - 2010/6/30

Y1 - 2010/6/30

N2 - In this study, the mass fabrication of microelectrode tools for microelectrochemical machining (MECM) was studied using microfabrication processes. The cantilever type geometry of microelectrodes was defined by photolithography processes, and metal patterns were made for electrical contacts. Various fabrication processes were studied for the fabrication of microelectrode tools, such as wet etching, lift-off, and electroforming for metal layer patterning. MECM test results showed feasibility of the fabricated electrode tools. The microfabricated electrodes can be used as micromachining tools for various electrical micromachining of steel mold and parts of microdevices.

AB - In this study, the mass fabrication of microelectrode tools for microelectrochemical machining (MECM) was studied using microfabrication processes. The cantilever type geometry of microelectrodes was defined by photolithography processes, and metal patterns were made for electrical contacts. Various fabrication processes were studied for the fabrication of microelectrode tools, such as wet etching, lift-off, and electroforming for metal layer patterning. MECM test results showed feasibility of the fabricated electrode tools. The microfabricated electrodes can be used as micromachining tools for various electrical micromachining of steel mold and parts of microdevices.

KW - Micro-electro-chemical machining (MECM)

KW - micro-electrode

KW - microfabrication

UR - http://www.scopus.com/inward/record.url?scp=77956041005&partnerID=8YFLogxK

U2 - 10.1142/S0217979210065398

DO - 10.1142/S0217979210065398

M3 - Article

AN - SCOPUS:77956041005

SN - 0217-9792

VL - 24

SP - 2639

EP - 2644

JO - International Journal of Modern Physics B

JF - International Journal of Modern Physics B

IS - 15-16

ER -

Fabrication of micro probe-type electrodes for microelectro-chemical machining using microfabrication

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this