Fabrication of multimode polymeric waveguides by hot embossing lithography

Keun Byoung Yoon; Choon Gi Choi; Sang Pil Han

doi:10.1143/JJAP.43.3450

Fabrication of multimode polymeric waveguides by hot embossing lithography

Keun Byoung Yoon, Choon Gi Choi, Sang Pil Han

Electronics and Telecommunications Research Institute

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Abstract

The fabrication of polymeric waveguides and the loss of waveguides were investigated for optical interconnection. Multimode polymeric waveguides were fabricated by hot embossing process. The replication of waveguide channels with hot embossing technology is of interest for single step processes that have to deliver a surface roughness far below the wavelength. Resulting waveguides exhibited a smooth surface profile and the square cross section of the core. The average propagation loss of these waveguides was approximately 0.2 dB/cm at 850 nm wavelength.

Original language	English
Pages (from-to)	3450-3451
Number of pages	2
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	43
Issue number	6 A
DOIs	https://doi.org/10.1143/JJAP.43.3450
State	Published - Jun 2004

Keywords

Hot embossing
Optical waveguides
Polymeric multimode waveguide

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10.1143/JJAP.43.3450

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abstract = "The fabrication of polymeric waveguides and the loss of waveguides were investigated for optical interconnection. Multimode polymeric waveguides were fabricated by hot embossing process. The replication of waveguide channels with hot embossing technology is of interest for single step processes that have to deliver a surface roughness far below the wavelength. Resulting waveguides exhibited a smooth surface profile and the square cross section of the core. The average propagation loss of these waveguides was approximately 0.2 dB/cm at 850 nm wavelength.",

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AU - Han, Sang Pil

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N2 - The fabrication of polymeric waveguides and the loss of waveguides were investigated for optical interconnection. Multimode polymeric waveguides were fabricated by hot embossing process. The replication of waveguide channels with hot embossing technology is of interest for single step processes that have to deliver a surface roughness far below the wavelength. Resulting waveguides exhibited a smooth surface profile and the square cross section of the core. The average propagation loss of these waveguides was approximately 0.2 dB/cm at 850 nm wavelength.

AB - The fabrication of polymeric waveguides and the loss of waveguides were investigated for optical interconnection. Multimode polymeric waveguides were fabricated by hot embossing process. The replication of waveguide channels with hot embossing technology is of interest for single step processes that have to deliver a surface roughness far below the wavelength. Resulting waveguides exhibited a smooth surface profile and the square cross section of the core. The average propagation loss of these waveguides was approximately 0.2 dB/cm at 850 nm wavelength.

KW - Hot embossing

KW - Optical waveguides

KW - Polymeric multimode waveguide

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JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 6 A

ER -

Fabrication of multimode polymeric waveguides by hot embossing lithography

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Keywords

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