TY - GEN
T1 - Fabrication of nano-scale conductors by selective femtosecond laser sintering of metal nanoparticles
AU - Son, Yong
AU - Lim, Tae Woo
AU - Yeo, Junyeob
AU - Ko, Seung Hwan
AU - Yang, Dong Yo
PY - 2010
Y1 - 2010
N2 - For various applications in electronic devices, metal nanopatterns fabrication on various substrates, such as glass and flexible polymers has become important. Recently, selective laser sintering of nanomaterials has emerged as a promising approach to the fabrication of precise metal nanopatterns without using any conventional vacuum deposition or photolithography. In this study, we present the experimental results on the fabrication of subwavelength scale silver nanopatterns using a femtosecond laser for the first time. By applying a femtosecond laser for the selective sintering of metal nanoparticles on a heat sensitive substrate, the heat-affected zone during the laser sintering process can be minimized. Through this work, metal conductors with nanometer features and a high conductivity were successfully fabricated.
AB - For various applications in electronic devices, metal nanopatterns fabrication on various substrates, such as glass and flexible polymers has become important. Recently, selective laser sintering of nanomaterials has emerged as a promising approach to the fabrication of precise metal nanopatterns without using any conventional vacuum deposition or photolithography. In this study, we present the experimental results on the fabrication of subwavelength scale silver nanopatterns using a femtosecond laser for the first time. By applying a femtosecond laser for the selective sintering of metal nanoparticles on a heat sensitive substrate, the heat-affected zone during the laser sintering process can be minimized. Through this work, metal conductors with nanometer features and a high conductivity were successfully fabricated.
UR - http://www.scopus.com/inward/record.url?scp=79951819286&partnerID=8YFLogxK
U2 - 10.1109/NANO.2010.5697903
DO - 10.1109/NANO.2010.5697903
M3 - Conference contribution
AN - SCOPUS:79951819286
SN - 9781424470334
T3 - 2010 10th IEEE Conference on Nanotechnology, NANO 2010
SP - 390
EP - 393
BT - 2010 10th IEEE Conference on Nanotechnology, NANO 2010
T2 - 2010 10th IEEE Conference on Nanotechnology, NANO 2010
Y2 - 17 August 2010 through 20 August 2010
ER -