Fabrication of Oxidized Porous Silicon (OPS) air-bridge for RF application using micromachining technology
- Y. M. Kim
- , K. Y. Noh
- , J. Y. Park
- , J. H. Lee
- , Y. D. Kim
- , I. S. Yu
- , C. S. Cho
- Kyungpook National University
- Lumsonic Co. Ltd.
- Kyungdong Coll. of Techno-Info.
Research output: Contribution to journal › Article › peer-review
9
Scopus
citations