Fabrication of photonic waveguides in sulfide chalcogenide glasses by selective wet-etching

L. Su; C. J. Rowlands; T. H. Lee; S. R. Elliott

doi:10.1049/el:20080510

Fabrication of photonic waveguides in sulfide chalcogenide glasses by selective wet-etching

L. Su, C. J. Rowlands, T. H. Lee, S. R. Elliott

University of Cambridge

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

A selective wet-etching method for micro-fabricating As₂S ₃ glass ridge waveguides, using CS₂ solution with iodine as an oxidising reactant, has been developed. The proposed method is based on photo-induced changes in chalcogenide glasses, and therefore can be free of photomasks and photoresists. The optical properties of such etched ridge waveguides have been tested and they exhibit a more than 2dB/cm loss reduction compared to laser direct-written channel waveguides.

Original language	English
Pages (from-to)	472-474
Number of pages	3
Journal	Electronics Letters
Volume	44
Issue number	7
DOIs	https://doi.org/10.1049/el:20080510
State	Published - 2008

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@article{124893d250ca4aae8e8d5315dffbfcc2,

title = "Fabrication of photonic waveguides in sulfide chalcogenide glasses by selective wet-etching",

abstract = "A selective wet-etching method for micro-fabricating As2S 3 glass ridge waveguides, using CS2 solution with iodine as an oxidising reactant, has been developed. The proposed method is based on photo-induced changes in chalcogenide glasses, and therefore can be free of photomasks and photoresists. The optical properties of such etched ridge waveguides have been tested and they exhibit a more than 2dB/cm loss reduction compared to laser direct-written channel waveguides.",

author = "L. Su and Rowlands, {C. J.} and Lee, {T. H.} and Elliott, {S. R.}",

year = "2008",

doi = "10.1049/el:20080510",

language = "English",

volume = "44",

pages = "472--474",

journal = "Electronics Letters",

issn = "0013-5194",

publisher = "John Wiley & Sons Inc.",

number = "7",

}

TY - JOUR

T1 - Fabrication of photonic waveguides in sulfide chalcogenide glasses by selective wet-etching

AU - Su, L.

AU - Rowlands, C. J.

AU - Lee, T. H.

AU - Elliott, S. R.

PY - 2008

Y1 - 2008

N2 - A selective wet-etching method for micro-fabricating As2S 3 glass ridge waveguides, using CS2 solution with iodine as an oxidising reactant, has been developed. The proposed method is based on photo-induced changes in chalcogenide glasses, and therefore can be free of photomasks and photoresists. The optical properties of such etched ridge waveguides have been tested and they exhibit a more than 2dB/cm loss reduction compared to laser direct-written channel waveguides.

AB - A selective wet-etching method for micro-fabricating As2S 3 glass ridge waveguides, using CS2 solution with iodine as an oxidising reactant, has been developed. The proposed method is based on photo-induced changes in chalcogenide glasses, and therefore can be free of photomasks and photoresists. The optical properties of such etched ridge waveguides have been tested and they exhibit a more than 2dB/cm loss reduction compared to laser direct-written channel waveguides.

UR - http://www.scopus.com/inward/record.url?scp=41149168811&partnerID=8YFLogxK

U2 - 10.1049/el:20080510

DO - 10.1049/el:20080510

M3 - Article

AN - SCOPUS:41149168811

SN - 0013-5194

VL - 44

SP - 472

EP - 474

JO - Electronics Letters

JF - Electronics Letters

IS - 7

ER -

Fabrication of photonic waveguides in sulfide chalcogenide glasses by selective wet-etching

Abstract

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