Fabrication of recessed-gate AlGaN/GaN MOSFETs using TMAH wet etching with Cu ion implantation

  • Jun Hyeok Heo
  • , Sang Ho Lee
  • , Jin Park
  • , Ga Eon Kang
  • , Young Jun Yoon
  • , In Man Kang

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Fabrication of recessed-gate AlGaN/GaN MOSFETs using TMAH wet etching with Cu ion implantation'. Together they form a unique fingerprint.
Sort by

Material Science