Fingerprint
Dive into the research topics of 'Fabrication of sub-20 nm patterns using dopamine chemistry in self-aligned double patterning'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Fabrication of sub-20 nm patterns using dopamine chemistry in self-aligned double patterning
- Yinyong Li
- , Jaewon Choi
- , Zhiwei Sun
- , Thomas P. Russell
- , Kenneth R. Carter
Research output: Contribution to journal › Article › peer-review
12
Scopus
citations