Fabrication of the multi-PCR chamber with inner heat-sink materials using a micro-blaster etching technique

Hyoung Jin Park; Duk Soo Eun; Dae Young Kong; Seong Jin Kong; Seong Ho Kong; Jang Kyoo Shin; Jong Hyun Lee

doi:10.1109/ICMENS.2005.49

Fabrication of the multi-PCR chamber with inner heat-sink materials using a micro-blaster etching technique

Hyoung Jin Park, Duk Soo Eun, Dae Young Kong, Seong Jin Kong, Seong Ho Kong, Jang Kyoo Shin, Jong Hyun Lee

School of Electronics Engineering

Kyungpook National University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper, we propose a new design for a PCR (Polymerase Chain Reaction) chamber with a temperature sensor under a top glass wafer and heaters on the bottom glass wafer. These chamber sensors are thermally isolated from the heater. The multi PCR chamber has an inner heat-sink material of etched silicon mass or glass mass using a micro-blaster. Then we will capture the image of the thermal mass temperature profile among the chambers by using the TIS (Thermal Imaging System). The performance of the inner heat-sink materials is analyzed during the PCR cycles and the thermal interference of the chamber, respectively.

Original language	English
Title of host publication	Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
Pages	301-304
Number of pages	4
DOIs	https://doi.org/10.1109/ICMENS.2005.49
State	Published - 2005
Event	2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 - Banff, Alberta, Canada Duration: 24 Jul 2006 → 27 Jul 2006

Publication series

Name	Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Conference

Conference	2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
Country/Territory	Canada
City	Banff, Alberta
Period	24/07/06 → 27/07/06

Access to Document

10.1109/ICMENS.2005.49

Cite this

Park, H. J., Eun, D. S., Kong, D. Y., Kong, S. J., Kong, S. H., Shin, J. K., & Lee, J. H. (2005). Fabrication of the multi-PCR chamber with inner heat-sink materials using a micro-blaster etching technique. In Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 (pp. 301-304). Article 1540840 (Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005). https://doi.org/10.1109/ICMENS.2005.49

@inproceedings{92b41eed062b4693864c91b299390b84,

title = "Fabrication of the multi-PCR chamber with inner heat-sink materials using a micro-blaster etching technique",

abstract = "In this paper, we propose a new design for a PCR (Polymerase Chain Reaction) chamber with a temperature sensor under a top glass wafer and heaters on the bottom glass wafer. These chamber sensors are thermally isolated from the heater. The multi PCR chamber has an inner heat-sink material of etched silicon mass or glass mass using a micro-blaster. Then we will capture the image of the thermal mass temperature profile among the chambers by using the TIS (Thermal Imaging System). The performance of the inner heat-sink materials is analyzed during the PCR cycles and the thermal interference of the chamber, respectively.",

author = "Park, {Hyoung Jin} and Eun, {Duk Soo} and Kong, {Dae Young} and Kong, {Seong Jin} and Kong, {Seong Ho} and Shin, {Jang Kyoo} and Lee, {Jong Hyun}",

year = "2005",

doi = "10.1109/ICMENS.2005.49",

language = "English",

isbn = "0769523986",

series = "Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005",

pages = "301--304",

booktitle = "Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005",

note = "2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 ; Conference date: 24-07-2006 Through 27-07-2006",

}

Park, HJ, Eun, DS, Kong, DY, Kong, SJ, Kong, SH, Shin, JK & Lee, JH 2005, Fabrication of the multi-PCR chamber with inner heat-sink materials using a micro-blaster etching technique. in Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005., 1540840, Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005, pp. 301-304, 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005, Banff, Alberta, Canada, 24/07/06. https://doi.org/10.1109/ICMENS.2005.49

Fabrication of the multi-PCR chamber with inner heat-sink materials using a micro-blaster etching technique. / Park, Hyoung Jin; Eun, Duk Soo; Kong, Dae Young et al.
Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005. 2005. p. 301-304 1540840 (Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Fabrication of the multi-PCR chamber with inner heat-sink materials using a micro-blaster etching technique

AU - Park, Hyoung Jin

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N2 - In this paper, we propose a new design for a PCR (Polymerase Chain Reaction) chamber with a temperature sensor under a top glass wafer and heaters on the bottom glass wafer. These chamber sensors are thermally isolated from the heater. The multi PCR chamber has an inner heat-sink material of etched silicon mass or glass mass using a micro-blaster. Then we will capture the image of the thermal mass temperature profile among the chambers by using the TIS (Thermal Imaging System). The performance of the inner heat-sink materials is analyzed during the PCR cycles and the thermal interference of the chamber, respectively.

AB - In this paper, we propose a new design for a PCR (Polymerase Chain Reaction) chamber with a temperature sensor under a top glass wafer and heaters on the bottom glass wafer. These chamber sensors are thermally isolated from the heater. The multi PCR chamber has an inner heat-sink material of etched silicon mass or glass mass using a micro-blaster. Then we will capture the image of the thermal mass temperature profile among the chambers by using the TIS (Thermal Imaging System). The performance of the inner heat-sink materials is analyzed during the PCR cycles and the thermal interference of the chamber, respectively.

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Park HJ, Eun DS, Kong DY, Kong SJ, Kong SH, Shin JK et al. Fabrication of the multi-PCR chamber with inner heat-sink materials using a micro-blaster etching technique. In Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005. 2005. p. 301-304. 1540840. (Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005). doi: 10.1109/ICMENS.2005.49

Fabrication of the multi-PCR chamber with inner heat-sink materials using a micro-blaster etching technique

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