Fabrication of ZnO/GaN hybrid light-emitting diodes

Sang Youn Han, H. S. Yang, Y. W. Heo, K. H. Baik, D. P. Norton, S. J. Pearton, F. Ren, A. Osinsky, J. W. Dong, B. Hertog, A. M. Dabiran, P. P. Chow, L. Chemyak, T. Steiner, C. J. Kao, G. C. Chi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We report on the fabrication of UV light-emitting diodes (LEDs) based on a p-n junction n-ZnMgO/n-ZnO/p-AlGaN/p-GaN semiconductor triple-heterostructure. Radio-frequency plasma-assisted molecular beam epitaxy was used to grow the complete heterostructure on p-AlGaN/p-GaN c-plane sapphire templates. The LEDs were fabricated by a process involving both wet and dry etching. Electroluminescence emission most likely associated with ZnO excitonic transition was observed up to 370°C. The results show the potential of ZnO-based materials for UV emitters of potentially lower cost and with comparable or higher emission intensity than comparable AlGaN/GaN devices.

Original languageEnglish
Title of host publicationState-of-the-Art Program on Compound Semiconductors (SOTAPOCS XLIII) -and- Nitride and Wide Bandgap Semiconductors for Sensors, Photonics, and Electronics VI
PublisherElectrochemical Society Inc.
Pages58-63
Number of pages6
Edition2
ISBN (Electronic)9781607685395
StatePublished - 2006
Event43rd State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XLIII)and Nitride and Wide Bandgap Semiconductors for Sensors, Photonics, and Electronics VI Symposium - 208th Meetingof the Electrochemical Society - Los Angeles, CA, United States
Duration: 16 Oct 200521 Oct 2005

Publication series

NameECS Transactions
Number2
Volume1
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

Conference43rd State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XLIII)and Nitride and Wide Bandgap Semiconductors for Sensors, Photonics, and Electronics VI Symposium - 208th Meetingof the Electrochemical Society
Country/TerritoryUnited States
CityLos Angeles, CA
Period16/10/0521/10/05

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