Fabrications of a continuous-flow DNA amplifier using dry film resist

The fabrication technique of DFR using micro channels can form hundreds micro thickness channels with only a photo-lithography process without any etching. Also, DFR is confirmed low consumption power because DFR has very lower thermal conductivity (2.33 W/mK) in comparison with silicon (168 W/mK) therefore displays high performance in heating an internal sample. As DFR is hydrophilic, it can bond with glasses without any treatment. Therefore, anodic bonding process using silicon bulk micromachining or an RIE process used in the PDMS fabrication technique using O₂ plasma is not necessary. According to these advantages, it is expected that production cost can be decreased because fabrication costs of the PCR chamber is decreased. In this paper, a soda-lime glass substrate coated with a DFR of the fluid to cycle through different temperature zones was used to form a micro-channel structure and integrated Pt heater continuous-flow PCR.