Fast industrial inspection of optical thin film using optical coherence tomography

Muhammad Faizan Shirazi, Kibeom Park, Ruchire Eranga Wijesinghe, Hyosang Jeong, Sangyeob Han, Pilun Kim, Mansik Jeon, Jeehyun Kim

Research output: Contribution to journalArticlepeer-review

47 Scopus citations

Abstract

An application of spectral domain optical coherence tomography (SD-OCT) was demonstrated for a fast industrial inspection of an optical thin film panel. An optical thin film sample similar to a liquid crystal display (LCD) panel was examined. Two identical SD-OCT systems were utilized for parallel scanning of a complete sample in half time. Dual OCT inspection heads were utilized for transverse (fast) scanning, while a stable linear motorized translational stage was used for lateral (slow) scanning. The cross-sectional and volumetric images of an optical thin film sample were acquired to detect the defects in glass and other layers that are difficult to observe using visual inspection methods. The rapid inspection enabled by this setup led to the early detection of product defects on the manufacturing line, resulting in a significant improvement in the quality assurance of industrial products.

Original languageEnglish
Article number1598
JournalSensors
Volume16
Issue number10
DOIs
StatePublished - 1 Oct 2016

Keywords

  • GPU
  • Industrial inspection
  • LCD
  • OCT
  • Optical thin film

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