Gaas/algaas lensed light emitting diode by the meltback and regrowth in liquid phase epitaxy

Sung Ho Hahm, Gyu Seog Cho, Young Se Kwon

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

AlGaAs micro-lens was fabricated for light emitting diode (LED) applications using the liquid phase epitaxy (LPE) meltback technique. The lenses can be used to enhance the optical power of AlGaAs/GaAs LED’s. The meltback technique using the LPE provides simple fabrication procedures which is not easily achieved in the conventional lensedstructure.

Original languageEnglish
Pages (from-to)L910-L913
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume30
Issue number5
DOIs
StatePublished - May 1991

Keywords

  • Integration
  • Light emitting diode
  • Liquid phase epitaxy
  • Meltback etch
  • Micro-lens

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