Abstract
AlGaAs micro-lens was fabricated for light emitting diode (LED) applications using the liquid phase epitaxy (LPE) meltback technique. The lenses can be used to enhance the optical power of AlGaAs/GaAs LED’s. The meltback technique using the LPE provides simple fabrication procedures which is not easily achieved in the conventional lensedstructure.
| Original language | English |
|---|---|
| Pages (from-to) | L910-L913 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 30 |
| Issue number | 5 |
| DOIs | |
| State | Published - May 1991 |
Keywords
- Integration
- Light emitting diode
- Liquid phase epitaxy
- Meltback etch
- Micro-lens
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