Gas-Phase Pyrolysis of tert-Butyl(allyl)selenium, a New Precursor for Organometallic Chemical Vapor Deposition of ZnSe

Michal Danek; Jeung Soo Huh; Klavs F. Jensen; Douglas C. Gordon; Walter P. Kosar

doi:10.1021/cm00052a019

Gas-Phase Pyrolysis of tert-Butyl(allyl)selenium, a New Precursor for Organometallic Chemical Vapor Deposition of ZnSe

Michal Danek
, Jeung Soo Huh
, Klavs F. Jensen
, Douglas C. Gordon
, Walter P. Kosar

Massachusetts Institute of Technology
Advanced Technology Materials, Inc.

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Original language	English
Pages (from-to)	731-737
Number of pages	7
Journal	Chemistry of Materials
Volume	7
Issue number	4
DOIs	https://doi.org/10.1021/cm00052a019
State	Published - Apr 1995

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10.1021/cm00052a019

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title = "Gas-Phase Pyrolysis of tert-Butyl(allyl)selenium, a New Precursor for Organometallic Chemical Vapor Deposition of ZnSe",

author = "Michal Danek and Huh, \{Jeung Soo\} and Jensen, \{Klavs F.\} and Gordon, \{Douglas C.\} and Kosar, \{Walter P.\}",

year = "1995",

month = apr,

doi = "10.1021/cm00052a019",

language = "English",

volume = "7",

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journal = "Chemistry of Materials",

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AU - Danek, Michal

AU - Huh, Jeung Soo

AU - Jensen, Klavs F.

AU - Gordon, Douglas C.

AU - Kosar, Walter P.

PY - 1995/4

Y1 - 1995/4

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M3 - Article

AN - SCOPUS:33751154883

SN - 0897-4756

VL - 7

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JO - Chemistry of Materials

JF - Chemistry of Materials

IS - 4

ER -

Gas-Phase Pyrolysis of tert-Butyl(allyl)selenium, a New Precursor for Organometallic Chemical Vapor Deposition of ZnSe

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