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Giant piezoelectricity on Si for hyperactive MEMS

  • S. H. Baek
  • , J. Park
  • , D. M. Kim
  • , V. A. Aksyuk
  • , R. R. Das
  • , S. D. Bu
  • , D. A. Felker
  • , J. Lettieri
  • , V. Vaithyanathan
  • , S. S.N. Bharadwaja
  • , N. Bassiri-Gharb
  • , Y. B. Chen
  • , H. P. Sun
  • , C. M. Folkman
  • , H. W. Jang
  • , D. J. Kreft
  • , S. K. Streiffer
  • , R. Ramesh
  • , X. Q. Pan
  • , S. Trolier-McKinstry
    • D. G. Schlom, M. S. Rzchowski, R. H. Blick, C. B. Eom
  • University of Wisconsin-Madison
  • National Institute of Standards and Technology
  • Pennsylvania State University
  • University of Michigan, Ann Arbor
  • Argonne National Laboratory
  • University of California at Berkeley
  • Cornell University

Research output: Contribution to journal › Article › peer-review

471 Scopus citations

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