@inproceedings{00982a9f936d460c870eb5543ac9c39b,
title = "Growth of a-plane ZnO thin films on r-plane sapphire by plasma-assisted MBE",
abstract = "ZnO thin films have been epitaxially grown on r-plane sapphire by RF-plasma-assisted molecular beam epitaxy. X-ray diffraction (XRD) and transmission electron microscopy (TEM) studies indicate that the epitaxial relationship between ZnO and r-plane sapphire is (11{\=2}0 ) ZnO // (1{\=1}02) Sapphire and [0001] ZnO // [{\=1}101] sapphire. Atomic force microscopy measurements reveal islands extended along the sapphire [{\=1}101 ] direction. XRD omega rocking curves for the ZnO (11{\=2}0) reflection measured either parallel or perpendicular to the island direction suggest the defect density anisotropy along these directions. Due to the small lattice mismatch along the ZnO [0001] direction, few misfit dislocations were observed at the ZnO/Al 2O 3 interface in the high-resolution cross-sectional TEM image with the zone axis along the ZnO [1{\=1}00] direction.",
author = "Xie, {J. Q.} and Dong, {J. W.} and A. Osinsky and Chow, {P. P.} and Heo, {Y. W.} and Norton, {D. P.} and Pearton, {S. J.} and Dong, {X. Y.} and C. Adelmann and Palmstr{\o}m, {C. J.}",
year = "2006",
language = "English",
isbn = "1558998454",
series = "Materials Research Society Symposium Proceedings",
pages = "407--412",
booktitle = "Progress in Semiconductor Materials V - Novel Materials and Electronic and Optoelectronic Applications",
note = "2005 MRS Fall Meeting ; Conference date: 28-11-2005 Through 01-12-2005",
}