Growth of CuInO2 thin film using highly dense Cu2O-In2O3 composite targets

Jong Chul Lee, Young Woo Heo, Joon Hyung Lee, Jeong Joo Kim

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

It is reported that CuInO2 single phase is hardly obtainable by using the general mixed oxide synthesis route [M. Shimode, M. Sasaki, K. Mukaida, J. Solid State Chem. 151(1) (2000) 16.; L. Liu, K. Bai, H. Gong, P. Wu, Phys. Rev. B 72(12) (2005) 1252041.; H. Hahnn, C. Lorent, Z. Anorg. Allg. Chem. 279 (1955) 281.]. Therefore, the manufacturing of highly dense single phase targets for CuInO2 thin film growing is still challenging. In this study, a Cu2O-In2O3 composite target instead of a CuInO2 single phase target was fabricated by using the general mixed oxide synthesis route. Thin films of CuInO2 were grown on sapphire substrates by a pulsed laser deposition (PLD) process under various conditions, and c-axis oriented single phase CuInO2 thin films were grown successfully when oxygen partial pressure was controlled.

Original languageEnglish
Pages (from-to)1234-1237
Number of pages4
JournalThin Solid Films
Volume518
Issue number4
DOIs
StatePublished - 15 Dec 2009

Keywords

  • Composite target
  • CuInO
  • Delafossite structure
  • Films
  • Pulsed laser deposition
  • Transparent conducting oxide

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