Abstract
It is reported that CuInO2 single phase is hardly obtainable by using the general mixed oxide synthesis route [M. Shimode, M. Sasaki, K. Mukaida, J. Solid State Chem. 151(1) (2000) 16.; L. Liu, K. Bai, H. Gong, P. Wu, Phys. Rev. B 72(12) (2005) 1252041.; H. Hahnn, C. Lorent, Z. Anorg. Allg. Chem. 279 (1955) 281.]. Therefore, the manufacturing of highly dense single phase targets for CuInO2 thin film growing is still challenging. In this study, a Cu2O-In2O3 composite target instead of a CuInO2 single phase target was fabricated by using the general mixed oxide synthesis route. Thin films of CuInO2 were grown on sapphire substrates by a pulsed laser deposition (PLD) process under various conditions, and c-axis oriented single phase CuInO2 thin films were grown successfully when oxygen partial pressure was controlled.
Original language | English |
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Pages (from-to) | 1234-1237 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 518 |
Issue number | 4 |
DOIs | |
State | Published - 15 Dec 2009 |
Keywords
- Composite target
- CuInO
- Delafossite structure
- Films
- Pulsed laser deposition
- Transparent conducting oxide