Growth of CuInO2 thin film using highly dense Cu2O-In2O3 composite targets

Jong Chul Lee; Young Woo Heo; Joon Hyung Lee; Jeong Joo Kim

doi:10.1016/j.tsf.2009.03.225

Growth of CuInO₂ thin film using highly dense Cu₂O-In₂O₃ composite targets

Jong Chul Lee
, Young Woo Heo
, Joon Hyung Lee
, Jeong Joo Kim

Kyungpook National University

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

It is reported that CuInO₂ single phase is hardly obtainable by using the general mixed oxide synthesis route [M. Shimode, M. Sasaki, K. Mukaida, J. Solid State Chem. 151(1) (2000) 16.; L. Liu, K. Bai, H. Gong, P. Wu, Phys. Rev. B 72(12) (2005) 1252041.; H. Hahnn, C. Lorent, Z. Anorg. Allg. Chem. 279 (1955) 281.]. Therefore, the manufacturing of highly dense single phase targets for CuInO₂ thin film growing is still challenging. In this study, a Cu₂O-In₂O₃ composite target instead of a CuInO₂ single phase target was fabricated by using the general mixed oxide synthesis route. Thin films of CuInO₂ were grown on sapphire substrates by a pulsed laser deposition (PLD) process under various conditions, and c-axis oriented single phase CuInO₂ thin films were grown successfully when oxygen partial pressure was controlled.

Original language	English
Pages (from-to)	1234-1237
Number of pages	4
Journal	Thin Solid Films
Volume	518
Issue number	4
DOIs	https://doi.org/10.1016/j.tsf.2009.03.225
State	Published - 15 Dec 2009

Keywords

Composite target
CuInO
Delafossite structure
Films
Pulsed laser deposition
Transparent conducting oxide

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10.1016/j.tsf.2009.03.225

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title = "Growth of CuInO2 thin film using highly dense Cu2O-In2O3 composite targets",

abstract = "It is reported that CuInO2 single phase is hardly obtainable by using the general mixed oxide synthesis route [M. Shimode, M. Sasaki, K. Mukaida, J. Solid State Chem. 151(1) (2000) 16.; L. Liu, K. Bai, H. Gong, P. Wu, Phys. Rev. B 72(12) (2005) 1252041.; H. Hahnn, C. Lorent, Z. Anorg. Allg. Chem. 279 (1955) 281.]. Therefore, the manufacturing of highly dense single phase targets for CuInO2 thin film growing is still challenging. In this study, a Cu2O-In2O3 composite target instead of a CuInO2 single phase target was fabricated by using the general mixed oxide synthesis route. Thin films of CuInO2 were grown on sapphire substrates by a pulsed laser deposition (PLD) process under various conditions, and c-axis oriented single phase CuInO2 thin films were grown successfully when oxygen partial pressure was controlled.",

keywords = "Composite target, CuInO, Delafossite structure, Films, Pulsed laser deposition, Transparent conducting oxide",

author = "Lee, \{Jong Chul\} and Heo, \{Young Woo\} and Lee, \{Joon Hyung\} and Kim, \{Jeong Joo\}",

year = "2009",

month = dec,

day = "15",

doi = "10.1016/j.tsf.2009.03.225",

language = "English",

volume = "518",

pages = "1234--1237",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Growth of CuInO2 thin film using highly dense Cu2O-In2O3 composite targets

AU - Lee, Jong Chul

AU - Heo, Young Woo

AU - Lee, Joon Hyung

AU - Kim, Jeong Joo

PY - 2009/12/15

Y1 - 2009/12/15

N2 - It is reported that CuInO2 single phase is hardly obtainable by using the general mixed oxide synthesis route [M. Shimode, M. Sasaki, K. Mukaida, J. Solid State Chem. 151(1) (2000) 16.; L. Liu, K. Bai, H. Gong, P. Wu, Phys. Rev. B 72(12) (2005) 1252041.; H. Hahnn, C. Lorent, Z. Anorg. Allg. Chem. 279 (1955) 281.]. Therefore, the manufacturing of highly dense single phase targets for CuInO2 thin film growing is still challenging. In this study, a Cu2O-In2O3 composite target instead of a CuInO2 single phase target was fabricated by using the general mixed oxide synthesis route. Thin films of CuInO2 were grown on sapphire substrates by a pulsed laser deposition (PLD) process under various conditions, and c-axis oriented single phase CuInO2 thin films were grown successfully when oxygen partial pressure was controlled.

AB - It is reported that CuInO2 single phase is hardly obtainable by using the general mixed oxide synthesis route [M. Shimode, M. Sasaki, K. Mukaida, J. Solid State Chem. 151(1) (2000) 16.; L. Liu, K. Bai, H. Gong, P. Wu, Phys. Rev. B 72(12) (2005) 1252041.; H. Hahnn, C. Lorent, Z. Anorg. Allg. Chem. 279 (1955) 281.]. Therefore, the manufacturing of highly dense single phase targets for CuInO2 thin film growing is still challenging. In this study, a Cu2O-In2O3 composite target instead of a CuInO2 single phase target was fabricated by using the general mixed oxide synthesis route. Thin films of CuInO2 were grown on sapphire substrates by a pulsed laser deposition (PLD) process under various conditions, and c-axis oriented single phase CuInO2 thin films were grown successfully when oxygen partial pressure was controlled.

KW - Composite target

KW - CuInO

KW - Delafossite structure

KW - Films

KW - Pulsed laser deposition

KW - Transparent conducting oxide

UR - https://www.scopus.com/pages/publications/71649084764

U2 - 10.1016/j.tsf.2009.03.225

DO - 10.1016/j.tsf.2009.03.225

M3 - Article

AN - SCOPUS:71649084764

SN - 0040-6090

VL - 518

SP - 1234

EP - 1237

JO - Thin Solid Films

JF - Thin Solid Films

IS - 4

ER -

Growth of CuInO₂ thin film using highly dense Cu₂O-In₂O₃ composite targets

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Keywords

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