Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation

J. S. Wi; H. M. Kim; H. S. Lee; S. W. Nam; K. B. Kim

doi:10.1109/IMNC.2007.4456149

Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation

J. S. Wi, H. M. Kim, H. S. Lee, S. W. Nam, K. B. Kim

Seoul National University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	152-153
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456149
State	Published - 2007
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: 5 Nov 2007 → 8 Nov 2007

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Conference

Conference	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/Territory	Japan
City	Kyoto
Period	5/11/07 → 8/11/07

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/IMNC.2007.4456149

Cite this

Wi, J. S., Kim, H. M., Lee, H. S., Nam, S. W., & Kim, K. B. (2007). Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 152-153). Article 4456149 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456149

Wi, J. S. ; Kim, H. M. ; Lee, H. S. et al. / Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 152-153 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

@inproceedings{55160e6a1aa84796829d5029146c810e,

title = "Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation",

author = "Wi, \{J. S.\} and Kim, \{H. M.\} and Lee, \{H. S.\} and Nam, \{S. W.\} and Kim, \{K. B.\}",

year = "2007",

doi = "10.1109/IMNC.2007.4456149",

language = "English",

isbn = "4990247248",

series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

pages = "152--153",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",

}

Wi, JS, Kim, HM, Lee, HS, Nam, SW & Kim, KB 2007, Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456149, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 152-153, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 5/11/07. https://doi.org/10.1109/IMNC.2007.4456149

Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation. / Wi, J. S.; Kim, H. M.; Lee, H. S. et al.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 152-153 4456149 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation

AU - Wi, J. S.

AU - Kim, H. M.

AU - Lee, H. S.

AU - Nam, S. W.

AU - Kim, K. B.

PY - 2007

Y1 - 2007

UR - https://www.scopus.com/pages/publications/47349096201

U2 - 10.1109/IMNC.2007.4456149

DO - 10.1109/IMNC.2007.4456149

M3 - Conference contribution

AN - SCOPUS:47349096201

SN - 4990247248

SN - 9784990247249

T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

SP - 152

EP - 153

BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007

Y2 - 5 November 2007 through 8 November 2007

ER -

Wi JS, Kim HM, Lee HS, Nam SW, Kim KB. Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 152-153. 4456149. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). doi: 10.1109/IMNC.2007.4456149

Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation

Publication series

Conference

UN SDGs

Access to Document

Other files and links

Cite this