Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation

J. S. Wi; H. M. Kim; H. S. Lee; S. W. Nam; K. B. Kim

doi:10.1109/IMNC.2007.4456149

Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation

J. S. Wi
, H. M. Kim
, H. S. Lee
, S. W. Nam
, K. B. Kim

Seoul National University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	152-153
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456149
State	Published - 2007
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: 5 Nov 2007 → 8 Nov 2007

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Conference

Conference	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/Territory	Japan
City	Kyoto
Period	5/11/07 → 8/11/07

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being

Access to Document

10.1109/IMNC.2007.4456149

Cite this

Wi, J. S., Kim, H. M., Lee, H. S., Nam, S. W., & Kim, K. B. (2007). Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 152-153). Article 4456149 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456149

Wi, J. S. ; Kim, H. M. ; Lee, H. S. et al. / Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 152-153 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

@inproceedings{55160e6a1aa84796829d5029146c810e,

title = "Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation",

author = "Wi, \{J. S.\} and Kim, \{H. M.\} and Lee, \{H. S.\} and Nam, \{S. W.\} and Kim, \{K. B.\}",

year = "2007",

doi = "10.1109/IMNC.2007.4456149",

language = "English",

isbn = "4990247248",

series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

pages = "152--153",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",

}

Wi, JS, Kim, HM, Lee, HS, Nam, SW & Kim, KB 2007, Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456149, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 152-153, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 5/11/07. https://doi.org/10.1109/IMNC.2007.4456149

Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation. / Wi, J. S.; Kim, H. M.; Lee, H. S. et al.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 152-153 4456149 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation

AU - Wi, J. S.

AU - Kim, H. M.

AU - Lee, H. S.

AU - Nam, S. W.

AU - Kim, K. B.

PY - 2007

Y1 - 2007

UR - https://www.scopus.com/pages/publications/47349096201

U2 - 10.1109/IMNC.2007.4456149

DO - 10.1109/IMNC.2007.4456149

M3 - Conference contribution

AN - SCOPUS:47349096201

SN - 4990247248

SN - 9784990247249

T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

SP - 152

EP - 153

BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007

Y2 - 5 November 2007 through 8 November 2007

ER -

Wi JS, Kim HM, Lee HS, Nam SW, Kim KB. Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 152-153. 4456149. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). doi: 10.1109/IMNC.2007.4456149

Guided formation of sub-10 nm suicide dot array and their morphology change by electron beam irradiation

Publication series

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UN SDGs

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