Abstract
AlGaAs micro-lens was fabricated for LED applications using the LPE meltback technique. The lenses can be used to enhance the efficiency of AlGaAs/GaAs LED's. The meltback technique using the LPE provides simple fabrication procedures and reproducibility which are not easily achieved in the conventional lensed structure.
Original language | English |
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Pages | 537-540 |
Number of pages | 4 |
State | Published - 1990 |
Event | 22nd International Conference on Solid State Devices and Materials - Sendai, Jpn Duration: 22 Aug 1990 → 24 Aug 1990 |
Conference
Conference | 22nd International Conference on Solid State Devices and Materials |
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City | Sendai, Jpn |
Period | 22/08/90 → 24/08/90 |