High-finesse AlxOy/AlGaAs nonabsorbing optical cavity

Hyun Eoi Shin; Young Gu Ju; Hyun Woo Song; Dae Sung Song; Il Young Han; Jung Hoon Ser; Han Youl Ryu; Yong Hee Lee; Hyo Hoon Park

doi:10.1063/1.121323

High-finesse Al_xO_y/AlGaAs nonabsorbing optical cavity

Hyun Eoi Shin, Young Gu Ju, Hyun Woo Song, Dae Sung Song, Il Young Han, Jung Hoon Ser, Han Youl Ryu, Yong Hee Lee, Hyo Hoon Park

Department of Physics Education

Research output: Contribution to journal › Article › peer-review

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Abstract

We report the measured finesse value of ∼390 in nonabsorbing Al_xO_y/AlGaAs cavities. The nonabsorbing cavity consisting of a bottom Al_xO_y/AlGaAs distributed Bragg reflector (DBR), an Al_xO_y spacer layer, and a top Al_xO_y/AlGaAs DBR is prepared by a wet-oxidation process. The measured resonance linewidth agrees well with that of calculation, indicating very small overall losses in the cavity. The wet-oxidation process does not seem to degrade the interface of the epitaxial layers significantly. The lower bound of maximum achievable reflectivity from the Al_xO_y DBR is estimated to be >99.95%, assuming an average interface roughness of about 0.6 nm. The maximum achievable finesse of this type of cavity is expected to be larger than that of the all-epitaxial counterpart assuming the same roughness.

Original language	English
Pages (from-to)	2205-2207
Number of pages	3
Journal	Applied Physics Letters
Volume	72
Issue number	18
DOIs	https://doi.org/10.1063/1.121323
State	Published - 1998

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title = "High-finesse AlxOy/AlGaAs nonabsorbing optical cavity",

abstract = "We report the measured finesse value of ∼390 in nonabsorbing AlxOy/AlGaAs cavities. The nonabsorbing cavity consisting of a bottom AlxOy/AlGaAs distributed Bragg reflector (DBR), an AlxOy spacer layer, and a top AlxOy/AlGaAs DBR is prepared by a wet-oxidation process. The measured resonance linewidth agrees well with that of calculation, indicating very small overall losses in the cavity. The wet-oxidation process does not seem to degrade the interface of the epitaxial layers significantly. The lower bound of maximum achievable reflectivity from the AlxOy DBR is estimated to be >99.95%, assuming an average interface roughness of about 0.6 nm. The maximum achievable finesse of this type of cavity is expected to be larger than that of the all-epitaxial counterpart assuming the same roughness.",

author = "Shin, {Hyun Eoi} and Ju, {Young Gu} and Song, {Hyun Woo} and Song, {Dae Sung} and Han, {Il Young} and Ser, {Jung Hoon} and Ryu, {Han Youl} and Lee, {Yong Hee} and Park, {Hyo Hoon}",

year = "1998",

doi = "10.1063/1.121323",

language = "English",

volume = "72",

pages = "2205--2207",

journal = "Applied Physics Letters",

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publisher = "American Institute of Physics",

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TY - JOUR

T1 - High-finesse AlxOy/AlGaAs nonabsorbing optical cavity

AU - Shin, Hyun Eoi

AU - Ju, Young Gu

AU - Song, Hyun Woo

AU - Song, Dae Sung

AU - Han, Il Young

AU - Ser, Jung Hoon

AU - Ryu, Han Youl

AU - Lee, Yong Hee

AU - Park, Hyo Hoon

PY - 1998

Y1 - 1998

N2 - We report the measured finesse value of ∼390 in nonabsorbing AlxOy/AlGaAs cavities. The nonabsorbing cavity consisting of a bottom AlxOy/AlGaAs distributed Bragg reflector (DBR), an AlxOy spacer layer, and a top AlxOy/AlGaAs DBR is prepared by a wet-oxidation process. The measured resonance linewidth agrees well with that of calculation, indicating very small overall losses in the cavity. The wet-oxidation process does not seem to degrade the interface of the epitaxial layers significantly. The lower bound of maximum achievable reflectivity from the AlxOy DBR is estimated to be >99.95%, assuming an average interface roughness of about 0.6 nm. The maximum achievable finesse of this type of cavity is expected to be larger than that of the all-epitaxial counterpart assuming the same roughness.

AB - We report the measured finesse value of ∼390 in nonabsorbing AlxOy/AlGaAs cavities. The nonabsorbing cavity consisting of a bottom AlxOy/AlGaAs distributed Bragg reflector (DBR), an AlxOy spacer layer, and a top AlxOy/AlGaAs DBR is prepared by a wet-oxidation process. The measured resonance linewidth agrees well with that of calculation, indicating very small overall losses in the cavity. The wet-oxidation process does not seem to degrade the interface of the epitaxial layers significantly. The lower bound of maximum achievable reflectivity from the AlxOy DBR is estimated to be >99.95%, assuming an average interface roughness of about 0.6 nm. The maximum achievable finesse of this type of cavity is expected to be larger than that of the all-epitaxial counterpart assuming the same roughness.

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DO - 10.1063/1.121323

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SN - 0003-6951

VL - 72

SP - 2205

EP - 2207

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 18

ER -

High-finesse Al_xO_y/AlGaAs nonabsorbing optical cavity

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