Abstract
Fluoroelastomer (FKM), a thermosetting elastomer, stands out with its excellent friction characteristics and exceptional attributes of chemical, vacuum, and heat resistance, setting it apart from typical rubber materials. Leveraging these qualities, FKM emerges as the optimal material for friction pads used in extreme environments requiring high temperatures and vacuum, such as space and semiconductor processes. In this study, we introduce micropatterned bolt-inserted FKM pads (BIFP) designed to enhance friction, productivity, and usability. To produce BIFPs with improved friction characteristics, various microstructures were designed and tested for their friction performance. Additionally, to meet the demand for extended durability, we conducted 500,000-cycle repetitive tests. In terms of performance, durability, and usability, the developed BIFPs will be utilized widely, especially in industrial settings requiring harsh operating conditions.
| Original language | English |
|---|---|
| Pages (from-to) | 2145-2152 |
| Number of pages | 8 |
| Journal | International Journal of Precision Engineering and Manufacturing |
| Volume | 25 |
| Issue number | 10 |
| DOIs | |
| State | Published - Oct 2024 |
Keywords
- Fluoroelastomer (FKM)
- Friction
- Micropattern
- Semiconductor manufacturing
- VESPEL
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